TY - JOUR
T1 - Interfacial studies for improving the adhesion of diamond-like carbon films on steel
AU - Chen, Chun Chin
AU - Hong, Franklin Chau Nan
N1 - Funding Information:
Financial support for this work from the Ministry of Economic Affairs under contract No. 92-EC-17-A-07-S1-00188 and Center for Micro-Nano Technology National Cheng Kung University is gratefully acknowledged.
PY - 2005/4/30
Y1 - 2005/4/30
N2 - The adhesion of diamond-like carbon (DLC) films on steel is usually very poor. Adhesion of DLC on SKD11 steel was improved for tribological purposes in this study by applying chromium (Cr) metal intermediate layers using magnetron sputtering with substrate bias. DLC films were deposited by inductively coupled plasma (ICP) chemical vapor deposition. However, the adhesion was only at medium level. Intermixing at the Cr-steel interface was further achieved by ion bombardment and found to remarkably improve the adhesion. A reliable process was established to improve the adhesion to top level.
AB - The adhesion of diamond-like carbon (DLC) films on steel is usually very poor. Adhesion of DLC on SKD11 steel was improved for tribological purposes in this study by applying chromium (Cr) metal intermediate layers using magnetron sputtering with substrate bias. DLC films were deposited by inductively coupled plasma (ICP) chemical vapor deposition. However, the adhesion was only at medium level. Intermixing at the Cr-steel interface was further achieved by ion bombardment and found to remarkably improve the adhesion. A reliable process was established to improve the adhesion to top level.
UR - https://www.scopus.com/pages/publications/14544293587
UR - https://www.scopus.com/pages/publications/14544293587#tab=citedBy
U2 - 10.1016/j.apsusc.2004.09.085
DO - 10.1016/j.apsusc.2004.09.085
M3 - Article
AN - SCOPUS:14544293587
SN - 0169-4332
VL - 243
SP - 296
EP - 303
JO - Applied Surface Science
JF - Applied Surface Science
IS - 1-4
ER -