Inverse-feedforward and robust-feedback control for high-speed operation on piezo-stages

Po Jen Ko, Yen Po Wang, Szu Chi Tien

Research output: Contribution to journalArticlepeer-review

11 Citations (Scopus)

Abstract

This article demonstrates an approach to compensate for tracking errors resulting from hysteresis and vibration when operating piezo-stages and to achieve precision motion control on them. In order to achieve this goal, inverse-feedforward control and H -feedback control were utilised to augment each other. Experimental results showed that pure feedforward control would suffer from modelling uncertainty and pure feedback control would be limited on its bandwidth; therefore, both of these could compensate for partial tracking errors. In contrast, the proposed approach integrated the merits of feedforward and feedback controls to improve the tracking performance when operating piezo-stages in long-stroke and high-speed.

Original languageEnglish
Pages (from-to)197-209
Number of pages13
JournalInternational Journal of Control
Volume86
Issue number2
DOIs
Publication statusPublished - 2013 Feb 1

All Science Journal Classification (ASJC) codes

  • Control and Systems Engineering
  • Computer Science Applications

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