Investigation of a metal-insulator-semiconductor Pt/mixed Al2 O3 and Ga2O3 insulator/AlGaN hydrogen sensor

Ching Ting Lee, Jheng Tai Yan

Research output: Contribution to journalArticlepeer-review

8 Citations (Scopus)

Abstract

Pt/mixed Al2O3 and Ga2O3 reactive insulator/AlGaN metal-insulator-semiconductor (MIS)-type hydrogen sensors were fabricated using a photoelectrochemical oxidation method to directly oxidize AlGaN employed for increasing the sensor response to hydrogen gas. When hydrogen gas was sensed, the MIS hydrogen sensors exhibited a larger reduction of the barrier height and series resistances than that of the Pt/AlGaN metal-semiconductor (MS)-type hydrogen sensors. As a result, the MIS hydrogen sensors could detect the hydrogen concentration lower than 100 ppm H2 /air while the MS hydrogen sensors could not detect such low hydrogen concentration. This provides a promising potential candidate of using a mixed Al2 O3 and Ga2O3 insulator for AlGaN-based hydrogen gas sensors.

Original languageEnglish
JournalJournal of the Electrochemical Society
Volume157
Issue number8
DOIs
Publication statusPublished - 2010 Jul 23

All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Renewable Energy, Sustainability and the Environment
  • Surfaces, Coatings and Films
  • Electrochemistry
  • Materials Chemistry

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