Investigation of Al-doped ZnO channel layer in ZnO-based transparent thin-film transistors

Hsin Ying Lee, Wen Ming Shien

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4 Citations (Scopus)


The enhancement mode and bottom gate Al-doped ZnO transparent thin-film transistors (ZnO:Al TTFTs) were investigated. To provide a suitable amount of free carriers and reduce the associated resistance, the ZnO:Al channel layer with Al imperceptibly doped into the ZnO was deposited using a cosputter system. To investigate the function and optimal thickness of the ZnO:Al channel layer, ZnO:Al layers of various thicknesses were deposited in the TTFTs. The maximum effective field-effect mobility (in the linear region) and the on/off current ratio of the ZnO:Al TTFTs with a 30-nm-thick ZnO:Al channel layer were 32.5 cm 2 V -1 s -1 and larger than 10 7, respectively. In this work, the effective field-effect mobility of 32.5 cm 2 V -1 s -1 is larger than the previous published performances of the ZnO TTFTs. To investigate the mechanisms of the optimal 30-nm-thick channel layer, the induced thickness of the channel layer was estimated. The estimated induced thickness is about 27 nm. The other 3-nm-thick ZnO:Al channel layer is used to passivate the induced channel layer.

Original languageEnglish
Article number026502
JournalJapanese journal of applied physics
Issue number2 PART 1
Publication statusPublished - 2012 Feb 1

All Science Journal Classification (ASJC) codes

  • Engineering(all)
  • Physics and Astronomy(all)


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