Investigation of Ceramic-Matrix Nanocomposites via Metal Organic Chemical Vapor Deposition

Jow Lay Huang, Wei Sheng Huang, Hau Dung Lin, Kang Tai Peng, Ding Fwu Lii

Research output: Contribution to journalConference articlepeer-review


The metal-organic chemical vapor deposition (MOCVD) conducted in fluidized bed was employed for the preparation of nano-sized ceramic-matrix composites. The metal-organic source was vaporized and then deposited onto ceramic-matrix powder surface. The composite powders were reduced in a gas mixture of H 2/N2, and then sintered. In this study, two kinds of composites, Mo5Si3/Si3N4 and Cr 3C2/Al2O3 were investigated. The XRD, SEM, and TEM were used to characterize the microstructure of samples at different processing stages. The mechanical properties of the composites were studied, too. Preliminary results indicate that the morphology of the initial deposition phase is amorphous with individual or island-like. Results also indicated that the mechanical properties of the sintered composite (only Mo 5Si3/Si3N4 was presented) was improved by the incorporation of nano second phase.

Original languageEnglish
Pages (from-to)123-128
Number of pages6
JournalKey Engineering Materials
Publication statusPublished - 2003 Jan 1
EventComposite Materials III: Proceedings of the 3rd China Cross-Strait Conference on Composite Materials - Wuhan, China
Duration: 2003 May 72003 May 12

All Science Journal Classification (ASJC) codes

  • Materials Science(all)
  • Mechanics of Materials
  • Mechanical Engineering


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