Multilayer coatings consisting of thin silver layer sandwiched between layers of Al-doped ZnO (AZO) were prepared by electron beam evaporation. The optical and electrical performances of AZO/Ag/AZO multilayers were investigated. Optimization of the multilayer coatings resulted with low sheet resistance of 7.7 Ω/sq and transmittance of 85%. The influence of thickness of each layer on the optic and electrical performance was analyzed. The sheet resistance of the multilayer was reduced to 5.34 Ω/sq. and the average transmittance was improved to 90% by the thermal treatment. The coatings had satisfactory properties of low resistance, high transmittance and thermal stability.
All Science Journal Classification (ASJC) codes
- Electronic, Optical and Magnetic Materials
- Surfaces and Interfaces
- Surfaces, Coatings and Films
- Metals and Alloys
- Materials Chemistry