Investigation of conductive and transparent Al-doped ZnO/Ag/Al-doped ZnO multilayer coatings by electron beam evaporation

D. R. Sahu; Shin Yuan Lin; Jow Lay Huang

doi:10.1016/j.tsf.2007.08.089

Investigation of conductive and transparent Al-doped ZnO/Ag/Al-doped ZnO multilayer coatings by electron beam evaporation

D. R. Sahu, Shin Yuan Lin, Jow Lay Huang

Research output: Contribution to journal › Article › peer-review

116 Citations (Scopus)

Abstract

Multilayer coatings consisting of thin silver layer sandwiched between layers of Al-doped ZnO (AZO) were prepared by electron beam evaporation. The optical and electrical performances of AZO/Ag/AZO multilayers were investigated. Optimization of the multilayer coatings resulted with low sheet resistance of 7.7 Ω/sq and transmittance of 85%. The influence of thickness of each layer on the optic and electrical performance was analyzed. The sheet resistance of the multilayer was reduced to 5.34 Ω/sq. and the average transmittance was improved to 90% by the thermal treatment. The coatings had satisfactory properties of low resistance, high transmittance and thermal stability.

Original language	English
Pages (from-to)	4728-4732
Number of pages	5
Journal	Thin Solid Films
Volume	516
Issue number	15
DOIs	https://doi.org/10.1016/j.tsf.2007.08.089
Publication status	Published - 2008 Jun 2

All Science Journal Classification (ASJC) codes

Electronic, Optical and Magnetic Materials
Surfaces and Interfaces
Surfaces, Coatings and Films
Metals and Alloys
Materials Chemistry

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abstract = "Multilayer coatings consisting of thin silver layer sandwiched between layers of Al-doped ZnO (AZO) were prepared by electron beam evaporation. The optical and electrical performances of AZO/Ag/AZO multilayers were investigated. Optimization of the multilayer coatings resulted with low sheet resistance of 7.7 Ω/sq and transmittance of 85%. The influence of thickness of each layer on the optic and electrical performance was analyzed. The sheet resistance of the multilayer was reduced to 5.34 Ω/sq. and the average transmittance was improved to 90% by the thermal treatment. The coatings had satisfactory properties of low resistance, high transmittance and thermal stability.",

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T1 - Investigation of conductive and transparent Al-doped ZnO/Ag/Al-doped ZnO multilayer coatings by electron beam evaporation

AU - Sahu, D. R.

AU - Lin, Shin Yuan

AU - Huang, Jow Lay

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AB - Multilayer coatings consisting of thin silver layer sandwiched between layers of Al-doped ZnO (AZO) were prepared by electron beam evaporation. The optical and electrical performances of AZO/Ag/AZO multilayers were investigated. Optimization of the multilayer coatings resulted with low sheet resistance of 7.7 Ω/sq and transmittance of 85%. The influence of thickness of each layer on the optic and electrical performance was analyzed. The sheet resistance of the multilayer was reduced to 5.34 Ω/sq. and the average transmittance was improved to 90% by the thermal treatment. The coatings had satisfactory properties of low resistance, high transmittance and thermal stability.

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