Investigation of conductive and transparent Al-doped ZnO/Ag/Al-doped ZnO multilayer coatings by electron beam evaporation

D. R. Sahu, Shin Yuan Lin, Jow Lay Huang

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116 Citations (Scopus)

Abstract

Multilayer coatings consisting of thin silver layer sandwiched between layers of Al-doped ZnO (AZO) were prepared by electron beam evaporation. The optical and electrical performances of AZO/Ag/AZO multilayers were investigated. Optimization of the multilayer coatings resulted with low sheet resistance of 7.7 Ω/sq and transmittance of 85%. The influence of thickness of each layer on the optic and electrical performance was analyzed. The sheet resistance of the multilayer was reduced to 5.34 Ω/sq. and the average transmittance was improved to 90% by the thermal treatment. The coatings had satisfactory properties of low resistance, high transmittance and thermal stability.

Original languageEnglish
Pages (from-to)4728-4732
Number of pages5
JournalThin Solid Films
Volume516
Issue number15
DOIs
Publication statusPublished - 2008 Jun 2

All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Surfaces and Interfaces
  • Surfaces, Coatings and Films
  • Metals and Alloys
  • Materials Chemistry

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