INVESTIGATION OF DEFECT CONCENTRATION DISTRIBUTIONS IN ION-IMPLANTED AND ANNEALED GaAs.

K. L. Wang, C. P. Li, P. M. Asbeck, C. G. Kirkpatrick

Research output: Chapter in Book/Report/Conference proceedingConference contribution

2 Citations (Scopus)
Original languageEnglish
Title of host publicationMat Res Soc Symp Proc
Pages487-493
Number of pages7
Publication statusPublished - 1981

Publication series

NameMat Res Soc Symp Proc
Volume2

All Science Journal Classification (ASJC) codes

  • Materials Science(all)
  • Condensed Matter Physics
  • Mechanics of Materials
  • Mechanical Engineering

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