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Investigation of Ga2 O3-based deep ultraviolet photodetectors using plasma-enhanced atomic layer deposition system
Shao Yu Chu, Meng Xian Shen, Tsung Han Yeh, Chia Hsun Chen, Ching Ting Lee, Hsin Ying Lee
Research output: Contribution to journal › Letter › peer-review
20
Citations
(Scopus)