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Investigation of Mo Doping Effects on the Properties of AlN-Based Piezoelectric Films Using a Sputtering Technique
Guang Huan Feng, Cheng Ying Li, Yueh Han Chen, Yi Chen Ho, Sheng Yuan Chu, Cheng Che Tsai, Cheng Shong Hong
Research output: Contribution to journal › Article › peer-review
5
Citations
(Scopus)