Investigation of nanocrystal-(Ti,Al)Nx/ amorphous-SiNy composite films by co-deposition process

Bao Shun Yau, Jow Lay Huang, Ding Fwu Lii, Pavol Sajgalik

Research output: Contribution to journalArticle

22 Citations (Scopus)

Abstract

Nanocrystal-(Ti,Al)Nx/amorphous-SiNy composite films were prepared by the co-deposition process. The effects of deposition parameters on the composition, microstructure and mechanical properties of nanocomposite films were investigated. Results indicated that the composition of composite films could be possibly controlled through the co-deposition process. Nanocrystal-(Ti,Al)Nx embedded in amorphous-SiNy matrix with (2 0 0) preferred orientation was observed. The content of amorphous-SiNy has substantial influence on the residual stress, columnar structure, nanocrystallite size and hardness.

Original languageEnglish
Pages (from-to)209-214
Number of pages6
JournalSurface and Coatings Technology
Volume177-178
DOIs
Publication statusPublished - 2004 Jan 30

All Science Journal Classification (ASJC) codes

  • Chemistry(all)
  • Condensed Matter Physics
  • Surfaces and Interfaces
  • Surfaces, Coatings and Films
  • Materials Chemistry

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