Investigation of nanocrystal-(Ti,Al)Nx/ amorphous-SiNy composite films by co-deposition process

Bao Shun Yau; Jow Lay Huang; Ding Fwu Lii; Pavol Sajgalik

doi:10.1016/j.surfcoat.2003.09.034

Investigation of nanocrystal-(Ti,Al)N_x/ amorphous-SiN_y composite films by co-deposition process

Bao Shun Yau
, Jow Lay Huang
, Ding Fwu Lii
, Pavol Sajgalik

Research output: Contribution to journal › Article › peer-review

25 Citations (Scopus)

Abstract

Nanocrystal-(Ti,Al)N_x/amorphous-SiN_y composite films were prepared by the co-deposition process. The effects of deposition parameters on the composition, microstructure and mechanical properties of nanocomposite films were investigated. Results indicated that the composition of composite films could be possibly controlled through the co-deposition process. Nanocrystal-(Ti,Al)N_x embedded in amorphous-SiN_y matrix with (2 0 0) preferred orientation was observed. The content of amorphous-SiN_y has substantial influence on the residual stress, columnar structure, nanocrystallite size and hardness.

Original language	English
Pages (from-to)	209-214
Number of pages	6
Journal	Surface and Coatings Technology
Volume	177-178
DOIs	https://doi.org/10.1016/j.surfcoat.2003.09.034
Publication status	Published - 2004 Jan 30

All Science Journal Classification (ASJC) codes

General Chemistry
Condensed Matter Physics
Surfaces and Interfaces
Surfaces, Coatings and Films
Materials Chemistry

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10.1016/j.surfcoat.2003.09.034

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title = "Investigation of nanocrystal-(Ti,Al)Nx/ amorphous-SiNy composite films by co-deposition process",

abstract = "Nanocrystal-(Ti,Al)Nx/amorphous-SiNy composite films were prepared by the co-deposition process. The effects of deposition parameters on the composition, microstructure and mechanical properties of nanocomposite films were investigated. Results indicated that the composition of composite films could be possibly controlled through the co-deposition process. Nanocrystal-(Ti,Al)Nx embedded in amorphous-SiNy matrix with (2 0 0) preferred orientation was observed. The content of amorphous-SiNy has substantial influence on the residual stress, columnar structure, nanocrystallite size and hardness.",

author = "Yau, \{Bao Shun\} and Huang, \{Jow Lay\} and Lii, \{Ding Fwu\} and Pavol Sajgalik",

note = "Funding Information: The authors would like to thank the National Science Council of the ROC for its financial support under the contract no. NSC 91-2216-E006-057.",

year = "2004",

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doi = "10.1016/j.surfcoat.2003.09.034",

language = "English",

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journal = "Surface and Coatings Technology",

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publisher = "Elsevier BV",

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TY - JOUR

T1 - Investigation of nanocrystal-(Ti,Al)Nx/ amorphous-SiNy composite films by co-deposition process

AU - Yau, Bao Shun

AU - Huang, Jow Lay

AU - Lii, Ding Fwu

AU - Sajgalik, Pavol

N1 - Funding Information: The authors would like to thank the National Science Council of the ROC for its financial support under the contract no. NSC 91-2216-E006-057.

PY - 2004/1/30

Y1 - 2004/1/30

N2 - Nanocrystal-(Ti,Al)Nx/amorphous-SiNy composite films were prepared by the co-deposition process. The effects of deposition parameters on the composition, microstructure and mechanical properties of nanocomposite films were investigated. Results indicated that the composition of composite films could be possibly controlled through the co-deposition process. Nanocrystal-(Ti,Al)Nx embedded in amorphous-SiNy matrix with (2 0 0) preferred orientation was observed. The content of amorphous-SiNy has substantial influence on the residual stress, columnar structure, nanocrystallite size and hardness.

AB - Nanocrystal-(Ti,Al)Nx/amorphous-SiNy composite films were prepared by the co-deposition process. The effects of deposition parameters on the composition, microstructure and mechanical properties of nanocomposite films were investigated. Results indicated that the composition of composite films could be possibly controlled through the co-deposition process. Nanocrystal-(Ti,Al)Nx embedded in amorphous-SiNy matrix with (2 0 0) preferred orientation was observed. The content of amorphous-SiNy has substantial influence on the residual stress, columnar structure, nanocrystallite size and hardness.

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DO - 10.1016/j.surfcoat.2003.09.034

M3 - Article

AN - SCOPUS:1342331945

SN - 0257-8972

VL - 177-178

SP - 209

EP - 214

JO - Surface and Coatings Technology

JF - Surface and Coatings Technology

ER -

Investigation of nanocrystal-(Ti,Al)N_x/ amorphous-SiN_y composite films by co-deposition process

Abstract

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