Investigation of post-annealing indium tin oxide for future electro-optical device application

Ching Yuan Ho, Tse Yi Tu, Chun Chieh Wang, Yuan Kang

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

The nanostructure transformation associated with electro-optical properties via post-annealing of indium tin oxide film (ITO) is investigated by increasing post-annealing temperature in ambient oxygen. Although oxygen vacancy and activation Sn ions contribute to conductivity of ITO film, the oxygen vacancy inevitably reduces during posting annealing, but Sn-O related bonds are oppositely increased with IR absorption at 790 cm-1. Moreover, the sheet resistance of as-deposited ITO film 8.6 ;Ωsq increases to 47 Ω/sq as the annealing temperature rises to 500°C., the photoluminescence (PL) spectrum indicates that the oxygen vacancy plays a key role in dominating Rs in comparison with Sn-O bonds. The blue light transmittance of ITO film is slightly proportional to the annealing temperature due to phase crystallization enhancing band gap narrowing. Furthermore, as the annealing temperature rises beyond 500°C, the transmittance is compromised between the Burstein-Moss effect of high carrier concentration and nanostructure crystallinity. The oxygen deficient vacancy, instead of Sn-O related bonds, is a major contribution for ITO conductivity and transmittance.

Original languageEnglish
Title of host publicationRecent Researches in Telecommunications, Informatics, Electronics and Signal Processing - TELE-INFO'11, MINO'11, SIP'11
Pages154-158
Number of pages5
Publication statusPublished - 2011 Dec 6
Event10th WSEAS International Conf. on Telecommunications and Informatics, TELE-INFO'11, 10th WSEAS International Conference on Microelectronics, Nanoelectronics, Optoelectronics, MINO'11, 10th WSEAS International Conference on Signal Processing, SIP'11 - Lanzarote, Canary Islands, Spain
Duration: 2011 May 272011 May 29

Publication series

NameRecent Researches in Telecommunications, Informatics, Electronics and Signal Processing - TELE-INFO'11, MINO'11, SIP'11

Conference

Conference10th WSEAS International Conf. on Telecommunications and Informatics, TELE-INFO'11, 10th WSEAS International Conference on Microelectronics, Nanoelectronics, Optoelectronics, MINO'11, 10th WSEAS International Conference on Signal Processing, SIP'11
CountrySpain
CityLanzarote, Canary Islands
Period11-05-2711-05-29

All Science Journal Classification (ASJC) codes

  • Computer Networks and Communications
  • Information Systems
  • Signal Processing
  • Electrical and Electronic Engineering

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