TY - GEN
T1 - Investigation of scratching nano grooves on aluminum film
AU - Huang, C. Y.
AU - Hsieh, C. H.
AU - Wang, Junz J.J.
AU - Hsu, C. T.
PY - 2009
Y1 - 2009
N2 - A mechanical machining method, scratch, is used to fabricate nano grooves in this investigation. The nanoindentation instrument with a lateral force module, which has high resolution three dimensional displacement and force sensors and actuators, is utilized to conduct the scratch tests. A Berkovich indenter with a sharp triangular pyramid diamond tip, whose tip radius is less than 50 nm, is used as a scriber to scratch aluminum film in these tests. To shape grooves, successful generation of chips to efficiently remove the material is crucial, and is affected by both scratch direction and depth. It is found that scratch the material by single face of the tip is the best direction to efficiently generate the chips. Moreover, the chips are usually attached to the end of the grooves and still needed to be removed. UV curing material is coated on the scratched sample, and is then separated from the sample after UV curing process. It is shown to be a good method to separate the chips from the sample.
AB - A mechanical machining method, scratch, is used to fabricate nano grooves in this investigation. The nanoindentation instrument with a lateral force module, which has high resolution three dimensional displacement and force sensors and actuators, is utilized to conduct the scratch tests. A Berkovich indenter with a sharp triangular pyramid diamond tip, whose tip radius is less than 50 nm, is used as a scriber to scratch aluminum film in these tests. To shape grooves, successful generation of chips to efficiently remove the material is crucial, and is affected by both scratch direction and depth. It is found that scratch the material by single face of the tip is the best direction to efficiently generate the chips. Moreover, the chips are usually attached to the end of the grooves and still needed to be removed. UV curing material is coated on the scratched sample, and is then separated from the sample after UV curing process. It is shown to be a good method to separate the chips from the sample.
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U2 - 10.1109/NANOMED.2009.5559098
DO - 10.1109/NANOMED.2009.5559098
M3 - Conference contribution
AN - SCOPUS:77957985755
SN - 9781424455287
T3 - 2009 IEEE 3rd International Conference on Nano/Molecular Medicine and Engineering, NANOMED 2009
SP - 146
EP - 149
BT - 2009 IEEE 3rd International Conference on Nano/Molecular Medicine and Engineering, NANOMED 2009
T2 - 2009 IEEE 3rd International Conference on Nano/Molecular Medicine and Engineering, NANOMED 2009
Y2 - 18 October 2009 through 21 October 2009
ER -