Investigation of silicon nanoclusters embedded in ZnO matrices deposited by cosputtering system

Li Wen Lai; Chih Hong Liu; Ching Ting Lee; Li Ren Lou; Wen Yung Yeh; Mu Tao Chu

doi:10.1557/jmr.2008.0309

Investigation of silicon nanoclusters embedded in ZnO matrices deposited by cosputtering system

Li Wen Lai, Chih Hong Liu, Ching Ting Lee, Li Ren Lou, Wen Yung Yeh, Mu Tao Chu

Department of Photonics

Research output: Contribution to journal › Article › peer-review

6 Citations (Scopus)

Abstract

A co-sputtering system was used to deposit silicon nanoclusters embedded in zinc oxide matrix (Si:ZnO) at low temperature without post-annealing. By adjusting the radio frequency power of the Si target during co-sputtering, Si:ZnO films with various crystallographic structures can be obtained. Silicon nanoclusters embedded in the zinc oxide matrix were examined using a high-resolution transmission electron microscope, x-ray diffractometer, and Fourier transformation infrared spectrometry. By comparing with photoluminescence spectra, we can clearly identify quantum confinement effect of silicon nanoclusters embedded in the ZnO matrix.

Original language	English
Pages (from-to)	2506-2511
Number of pages	6
Journal	Journal of Materials Research
Volume	23
Issue number	9
DOIs	https://doi.org/10.1557/jmr.2008.0309
Publication status	Published - 2008 Sep 1

All Science Journal Classification (ASJC) codes

Materials Science(all)
Condensed Matter Physics
Mechanics of Materials
Mechanical Engineering

Access to Document

10.1557/jmr.2008.0309

Fingerprint Dive into the research topics of 'Investigation of silicon nanoclusters embedded in ZnO matrices deposited by cosputtering system'. Together they form a unique fingerprint.

Cite this

@article{59bb3a8516b64a2baa79199242698436,

title = "Investigation of silicon nanoclusters embedded in ZnO matrices deposited by cosputtering system",

abstract = "A co-sputtering system was used to deposit silicon nanoclusters embedded in zinc oxide matrix (Si:ZnO) at low temperature without post-annealing. By adjusting the radio frequency power of the Si target during co-sputtering, Si:ZnO films with various crystallographic structures can be obtained. Silicon nanoclusters embedded in the zinc oxide matrix were examined using a high-resolution transmission electron microscope, x-ray diffractometer, and Fourier transformation infrared spectrometry. By comparing with photoluminescence spectra, we can clearly identify quantum confinement effect of silicon nanoclusters embedded in the ZnO matrix.",

author = "Lai, {Li Wen} and Liu, {Chih Hong} and Lee, {Ching Ting} and Lou, {Li Ren} and Yeh, {Wen Yung} and Chu, {Mu Tao}",

year = "2008",

month = sep,

day = "1",

doi = "10.1557/jmr.2008.0309",

language = "English",

volume = "23",

pages = "2506--2511",

journal = "Journal of Materials Research",

issn = "0884-2914",

publisher = "Materials Research Society",

number = "9",

}

TY - JOUR

T1 - Investigation of silicon nanoclusters embedded in ZnO matrices deposited by cosputtering system

AU - Lai, Li Wen

AU - Liu, Chih Hong

AU - Lee, Ching Ting

AU - Lou, Li Ren

AU - Yeh, Wen Yung

AU - Chu, Mu Tao

PY - 2008/9/1

Y1 - 2008/9/1

N2 - A co-sputtering system was used to deposit silicon nanoclusters embedded in zinc oxide matrix (Si:ZnO) at low temperature without post-annealing. By adjusting the radio frequency power of the Si target during co-sputtering, Si:ZnO films with various crystallographic structures can be obtained. Silicon nanoclusters embedded in the zinc oxide matrix were examined using a high-resolution transmission electron microscope, x-ray diffractometer, and Fourier transformation infrared spectrometry. By comparing with photoluminescence spectra, we can clearly identify quantum confinement effect of silicon nanoclusters embedded in the ZnO matrix.

AB - A co-sputtering system was used to deposit silicon nanoclusters embedded in zinc oxide matrix (Si:ZnO) at low temperature without post-annealing. By adjusting the radio frequency power of the Si target during co-sputtering, Si:ZnO films with various crystallographic structures can be obtained. Silicon nanoclusters embedded in the zinc oxide matrix were examined using a high-resolution transmission electron microscope, x-ray diffractometer, and Fourier transformation infrared spectrometry. By comparing with photoluminescence spectra, we can clearly identify quantum confinement effect of silicon nanoclusters embedded in the ZnO matrix.

UR - http://www.scopus.com/inward/record.url?scp=52649129324&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=52649129324&partnerID=8YFLogxK

U2 - 10.1557/jmr.2008.0309

DO - 10.1557/jmr.2008.0309

M3 - Article

AN - SCOPUS:52649129324

VL - 23

SP - 2506

EP - 2511

JO - Journal of Materials Research

JF - Journal of Materials Research

SN - 0884-2914

IS - 9

ER -

Investigation of silicon nanoclusters embedded in ZnO matrices deposited by cosputtering system

Abstract

All Science Journal Classification (ASJC) codes

Access to Document

Other files and links

Cite this