Investigation of static corrosion between W Metals and TiNx Barriers in a W chemical-mechanical-polishing slurry

Chi Cheng Hung, Ying Lang Wang, Wen Hsi Lee, Shih Chieh Chang

Research output: Contribution to journalArticlepeer-review

4 Citations (Scopus)

Fingerprint

Dive into the research topics of 'Investigation of static corrosion between W Metals and TiN<sub>x</sub> Barriers in a W chemical-mechanical-polishing slurry'. Together they form a unique fingerprint.

Engineering & Materials Science

Chemical Compounds