Investigation of the crystallization mechanisms in indium molybdenum oxide films by vacuum annealing

Shi Yao Sun, Jow Lay Huang, Ding Fwu Lii

Research output: Contribution to journalArticlepeer-review

4 Citations (Scopus)

Abstract

The crystallization mechanisms for potentially high mobility molybdenum-indiumoxide (IMO) film were studied. The crystalline IMO films were deposited on unheated glass substrates via high-density plasma evaporation, and subsequent vacuum annealing was performed at 150, 200, and 250 °C for 30 min. The results of x-ray diffraction and x-ray photoelectron spectroscopy and electrical properties suggested that the room-temperature crystallization was induced from the highest compressive strain, caused by the charged [(MoIn •••Oi″)] clusters and oxygen vacancies. The highest mobility of 75.8 cm2/Vs obtained at 250 °C was due to the charged In-Mo+6-O clusters and strain relaxation with (222)/(440) orientation change.

Original languageEnglish
Pages (from-to)2030-2037
Number of pages8
JournalJournal of Materials Research
Volume20
Issue number8
DOIs
Publication statusPublished - 2005 Aug

All Science Journal Classification (ASJC) codes

  • Materials Science(all)
  • Condensed Matter Physics
  • Mechanics of Materials
  • Mechanical Engineering

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