Investigation of the optical and the electrical characteristics of thin titanium dioxide films

S. L. Tu; Y. H. Su; Y. H. Shen; D. T. Ray; Y. C. Wu; T. H. Chen

doi:10.1179/1432891714Z.000000000594

Investigation of the optical and the electrical characteristics of thin titanium dioxide films

S. L. Tu, Y. H. Su, Y. H. Shen, D. T. Ray, Y. C. Wu, T. H. Chen

Research output: Contribution to journal › Article › peer-review

Abstract

This study dealt with the deposition of nanotitanium films with different thicknesses by using the ultrahigh vacuum ion beam sputtering system. It is found that the thickness of the titanium films was in the nanoscale thus the electric resistivity of the titanium films decreased. Moreover, the deposited titanium was transformed into titanium oxide in an oxygen atmosphere and by using a rapid annealing process. The photoelectronic properties of the nanotitanium thin film was enhanced, when the nanotitanium film was transformed to titanium dioxide.

Original language	English
Pages (from-to)	S26-S30
Journal	Materials Research Innovations
Volume	18
Issue number	SUPPL. 3
DOIs	https://doi.org/10.1179/1432891714Z.000000000594
Publication status	Published - 2014 May

All Science Journal Classification (ASJC) codes

Materials Science(all)
Condensed Matter Physics
Mechanics of Materials
Mechanical Engineering

Access to Document

10.1179/1432891714Z.000000000594

Fingerprint Dive into the research topics of 'Investigation of the optical and the electrical characteristics of thin titanium dioxide films'. Together they form a unique fingerprint.

Cite this

@article{1471c760c65140f195e5af2099a96032,

title = "Investigation of the optical and the electrical characteristics of thin titanium dioxide films",

abstract = "This study dealt with the deposition of nanotitanium films with different thicknesses by using the ultrahigh vacuum ion beam sputtering system. It is found that the thickness of the titanium films was in the nanoscale thus the electric resistivity of the titanium films decreased. Moreover, the deposited titanium was transformed into titanium oxide in an oxygen atmosphere and by using a rapid annealing process. The photoelectronic properties of the nanotitanium thin film was enhanced, when the nanotitanium film was transformed to titanium dioxide.",

author = "Tu, {S. L.} and Su, {Y. H.} and Shen, {Y. H.} and Ray, {D. T.} and Wu, {Y. C.} and Chen, {T. H.}",

year = "2014",

month = may,

doi = "10.1179/1432891714Z.000000000594",

language = "English",

volume = "18",

pages = "S26--S30",

journal = "Materials Research Innovations",

issn = "1432-8917",

publisher = "Maney Publishing",

number = "SUPPL. 3",

}

TY - JOUR

T1 - Investigation of the optical and the electrical characteristics of thin titanium dioxide films

AU - Tu, S. L.

AU - Su, Y. H.

AU - Shen, Y. H.

AU - Ray, D. T.

AU - Wu, Y. C.

AU - Chen, T. H.

PY - 2014/5

Y1 - 2014/5

N2 - This study dealt with the deposition of nanotitanium films with different thicknesses by using the ultrahigh vacuum ion beam sputtering system. It is found that the thickness of the titanium films was in the nanoscale thus the electric resistivity of the titanium films decreased. Moreover, the deposited titanium was transformed into titanium oxide in an oxygen atmosphere and by using a rapid annealing process. The photoelectronic properties of the nanotitanium thin film was enhanced, when the nanotitanium film was transformed to titanium dioxide.

AB - This study dealt with the deposition of nanotitanium films with different thicknesses by using the ultrahigh vacuum ion beam sputtering system. It is found that the thickness of the titanium films was in the nanoscale thus the electric resistivity of the titanium films decreased. Moreover, the deposited titanium was transformed into titanium oxide in an oxygen atmosphere and by using a rapid annealing process. The photoelectronic properties of the nanotitanium thin film was enhanced, when the nanotitanium film was transformed to titanium dioxide.

UR - http://www.scopus.com/inward/record.url?scp=84901404945&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=84901404945&partnerID=8YFLogxK

U2 - 10.1179/1432891714Z.000000000594

DO - 10.1179/1432891714Z.000000000594

M3 - Article

AN - SCOPUS:84901404945

VL - 18

SP - S26-S30

JO - Materials Research Innovations

JF - Materials Research Innovations

SN - 1432-8917

IS - SUPPL. 3

ER -