Investigation on laser assisted direct imprinting parameters for fabricating micro-and nano- structures

Fei Bin Hsiao; Yung Chun Lee; Cheng Hsin Chuang; Jun Yi Ruan

doi:10.1109/IMNC.2007.4456222

Investigation on laser assisted direct imprinting parameters for fabricating micro-and nano- structures

Fei Bin Hsiao, Yung Chun Lee, Cheng Hsin Chuang, Jun Yi Ruan

Department of Mechanical Engineering

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Abstract

The laser assisted direct imprint (LADI) technique can be perfectly carried out by using the quartz nano-negative molds. The effects of feature size are experimental verified by micro-positive molds as well.

Original language	English
Title of host publication	Digest of Papers - Microprocesses and Nanotechnology 2007; 20th International Microprocesses and Nanotechnology Conference, MNC
Pages	298-299
Number of pages	2
DOIs	https://doi.org/10.1109/IMNC.2007.4456222
Publication status	Published - 2007 Dec 1
Event	s20th International Microprocesses and Nanotechnology Conference, MNC 2007 - Kyoto, Japan Duration: 2007 Nov 5 → 2007 Nov 8

Publication series

Name	Digest of Papers - Microprocesses and Nanotechnology 2007; 20th International Microprocesses and Nanotechnology Conference, MNC

Other

Other	s20th International Microprocesses and Nanotechnology Conference, MNC 2007
Country/Territory	Japan
City	Kyoto
Period	07-11-05 → 07-11-08

All Science Journal Classification (ASJC) codes

Hardware and Architecture
Electrical and Electronic Engineering

Access to Document

10.1109/IMNC.2007.4456222

Cite this

Hsiao, F. B., Lee, Y. C., Chuang, C. H., & Ruan, J. Y. (2007). Investigation on laser assisted direct imprinting parameters for fabricating micro-and nano- structures. In Digest of Papers - Microprocesses and Nanotechnology 2007; 20th International Microprocesses and Nanotechnology Conference, MNC (pp. 298-299). [4456222] (Digest of Papers - Microprocesses and Nanotechnology 2007; 20th International Microprocesses and Nanotechnology Conference, MNC). https://doi.org/10.1109/IMNC.2007.4456222

Hsiao, Fei Bin ; Lee, Yung Chun ; Chuang, Cheng Hsin ; Ruan, Jun Yi. / Investigation on laser assisted direct imprinting parameters for fabricating micro-and nano- structures. Digest of Papers - Microprocesses and Nanotechnology 2007; 20th International Microprocesses and Nanotechnology Conference, MNC. 2007. pp. 298-299 (Digest of Papers - Microprocesses and Nanotechnology 2007; 20th International Microprocesses and Nanotechnology Conference, MNC).

@inproceedings{64be6c36661e42c9a1b69cfd1476da16,

title = "Investigation on laser assisted direct imprinting parameters for fabricating micro-and nano- structures",

abstract = "The laser assisted direct imprint (LADI) technique can be perfectly carried out by using the quartz nano-negative molds. The effects of feature size are experimental verified by micro-positive molds as well.",

author = "Hsiao, {Fei Bin} and Lee, {Yung Chun} and Chuang, {Cheng Hsin} and Ruan, {Jun Yi}",

year = "2007",

month = dec,

day = "1",

doi = "10.1109/IMNC.2007.4456222",

language = "English",

isbn = "4990247248",

series = "Digest of Papers - Microprocesses and Nanotechnology 2007; 20th International Microprocesses and Nanotechnology Conference, MNC",

pages = "298--299",

booktitle = "Digest of Papers - Microprocesses and Nanotechnology 2007; 20th International Microprocesses and Nanotechnology Conference, MNC",

note = "s20th International Microprocesses and Nanotechnology Conference, MNC 2007 ; Conference date: 05-11-2007 Through 08-11-2007",

}

Hsiao, FB, Lee, YC, Chuang, CH & Ruan, JY 2007, Investigation on laser assisted direct imprinting parameters for fabricating micro-and nano- structures. in Digest of Papers - Microprocesses and Nanotechnology 2007; 20th International Microprocesses and Nanotechnology Conference, MNC., 4456222, Digest of Papers - Microprocesses and Nanotechnology 2007; 20th International Microprocesses and Nanotechnology Conference, MNC, pp. 298-299, s20th International Microprocesses and Nanotechnology Conference, MNC 2007, Kyoto, Japan, 07-11-05. https://doi.org/10.1109/IMNC.2007.4456222

Investigation on laser assisted direct imprinting parameters for fabricating micro-and nano- structures. / Hsiao, Fei Bin; Lee, Yung Chun; Chuang, Cheng Hsin; Ruan, Jun Yi.

Digest of Papers - Microprocesses and Nanotechnology 2007; 20th International Microprocesses and Nanotechnology Conference, MNC. 2007. p. 298-299 4456222 (Digest of Papers - Microprocesses and Nanotechnology 2007; 20th International Microprocesses and Nanotechnology Conference, MNC).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

TY - GEN

T1 - Investigation on laser assisted direct imprinting parameters for fabricating micro-and nano- structures

AU - Hsiao, Fei Bin

AU - Lee, Yung Chun

AU - Chuang, Cheng Hsin

AU - Ruan, Jun Yi

PY - 2007/12/1

Y1 - 2007/12/1

N2 - The laser assisted direct imprint (LADI) technique can be perfectly carried out by using the quartz nano-negative molds. The effects of feature size are experimental verified by micro-positive molds as well.

AB - The laser assisted direct imprint (LADI) technique can be perfectly carried out by using the quartz nano-negative molds. The effects of feature size are experimental verified by micro-positive molds as well.

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DO - 10.1109/IMNC.2007.4456222

M3 - Conference contribution

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SN - 4990247248

SN - 9784990247249

T3 - Digest of Papers - Microprocesses and Nanotechnology 2007; 20th International Microprocesses and Nanotechnology Conference, MNC

SP - 298

EP - 299

BT - Digest of Papers - Microprocesses and Nanotechnology 2007; 20th International Microprocesses and Nanotechnology Conference, MNC

T2 - s20th International Microprocesses and Nanotechnology Conference, MNC 2007

Y2 - 5 November 2007 through 8 November 2007

ER -

Hsiao FB, Lee YC, Chuang CH, Ruan JY. Investigation on laser assisted direct imprinting parameters for fabricating micro-and nano- structures. In Digest of Papers - Microprocesses and Nanotechnology 2007; 20th International Microprocesses and Nanotechnology Conference, MNC. 2007. p. 298-299. 4456222. (Digest of Papers - Microprocesses and Nanotechnology 2007; 20th International Microprocesses and Nanotechnology Conference, MNC). https://doi.org/10.1109/IMNC.2007.4456222

Investigation on laser assisted direct imprinting parameters for fabricating micro-and nano- structures

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