@inproceedings{64be6c36661e42c9a1b69cfd1476da16,
title = "Investigation on laser assisted direct imprinting parameters for fabricating micro-and nano- structures",
abstract = "The laser assisted direct imprint (LADI) technique can be perfectly carried out by using the quartz nano-negative molds. The effects of feature size are experimental verified by micro-positive molds as well.",
author = "Hsiao, {Fei Bin} and Lee, {Yung Chun} and Chuang, {Cheng Hsin} and Ruan, {Jun Yi}",
year = "2007",
month = dec,
day = "1",
doi = "10.1109/IMNC.2007.4456222",
language = "English",
isbn = "4990247248",
series = "Digest of Papers - Microprocesses and Nanotechnology 2007; 20th International Microprocesses and Nanotechnology Conference, MNC",
pages = "298--299",
booktitle = "Digest of Papers - Microprocesses and Nanotechnology 2007; 20th International Microprocesses and Nanotechnology Conference, MNC",
note = "s20th International Microprocesses and Nanotechnology Conference, MNC 2007 ; Conference date: 05-11-2007 Through 08-11-2007",
}