TY - JOUR
T1 - Investigation on laser assisted direct imprinting parameters for fabricating micro- and nano-structures
AU - Lee, Yung Chun
AU - Hsiao, Fei Bin
AU - Chuang, Cheng Hsin
AU - Ruan, Jun Yi
AU - Chang, Shuo Hung
PY - 2008/6/20
Y1 - 2008/6/20
N2 - This paper experimentally investigates the dominant parameters in performing laser assisted direct imprinting (LADI) process, which utilizes quartz molds, pulsed laser heating, and contact pressure for direct fabricating micro/nano-structures on a silicon substrate. Based on pulsed laser heating, liquid film squeezing, and elastodynamic theories, a unified theory has been successfully developed before which can quantitatively explains the fundamental mechanism of LADI and predicts the correlations between the final imprinting depth and several important parameters including laser fluence, contact pressure, and feature size. To verify this theory, a series of LADI experiments have been carried out in this work. Experimental results, in their general trends, are in agreement with the theoretical predictions and therefore supporting the validity of the modeling. It also shows that further modifications on the theoretical model are needed based on the experimental results. Physical implications and potential applications of this modeling will be addressed.
AB - This paper experimentally investigates the dominant parameters in performing laser assisted direct imprinting (LADI) process, which utilizes quartz molds, pulsed laser heating, and contact pressure for direct fabricating micro/nano-structures on a silicon substrate. Based on pulsed laser heating, liquid film squeezing, and elastodynamic theories, a unified theory has been successfully developed before which can quantitatively explains the fundamental mechanism of LADI and predicts the correlations between the final imprinting depth and several important parameters including laser fluence, contact pressure, and feature size. To verify this theory, a series of LADI experiments have been carried out in this work. Experimental results, in their general trends, are in agreement with the theoretical predictions and therefore supporting the validity of the modeling. It also shows that further modifications on the theoretical model are needed based on the experimental results. Physical implications and potential applications of this modeling will be addressed.
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U2 - 10.1143/JJAP.47.5174
DO - 10.1143/JJAP.47.5174
M3 - Article
AN - SCOPUS:55049139952
VL - 47
SP - 5174
EP - 5177
JO - Japanese Journal of Applied Physics
JF - Japanese Journal of Applied Physics
SN - 0021-4922
IS - 6 PART 2
ER -