Investigation on the mechanical properties of molybdenum-doped zinc oxide transparent thin film by sputtering technique

Tao Hsing Chen, Po Tsung Hsieh, Chao Yu Huang, Ji Quan Wang, Ricky Wenkuei Chuang

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

Zinc oxide thin films were prepared on the glass substrate by rf-magnetron sputtering technique and their structural, optical, and mechanical characteristics were then investigated. As the SEM images have revealed, the average grain size of ZMO thin film are influenced by pressure and sputter power, and the average value of the grain size is about 30∼50 nm. The EDS analysis also revealed a successful doping of Mo in ZnO thin film. The transmittance property of ZMO thin film exhibited an excellent transparency in the visible range, where the transmittance was about 90% for ZMO film with Mo. Moreover, good transmittance was also demonstrated in the range of 350nm to 400nm (UV regime). Finally, the nano-mechanical properties of ZMO thin films were investigated using a nanoindentation technique. The corresponding result would show that the Young's modulus and hardness both increased with decreasing pressure.

Original languageEnglish
Title of host publicationPRICM7
PublisherTrans Tech Publications Ltd
Pages1756-1759
Number of pages4
ISBN (Print)0878492550, 9780878492558
DOIs
Publication statusPublished - 2010 Jan 1
Event7th Pacific Rim International Conference on Advanced Materials and Processing, PRICM-7 - Cairns, QLD, Australia
Duration: 2010 Aug 22010 Aug 6

Publication series

NameMaterials Science Forum
Volume654-656
ISSN (Print)0255-5476
ISSN (Electronic)1662-9752

Other

Other7th Pacific Rim International Conference on Advanced Materials and Processing, PRICM-7
CountryAustralia
CityCairns, QLD
Period10-08-0210-08-06

All Science Journal Classification (ASJC) codes

  • Materials Science(all)
  • Condensed Matter Physics
  • Mechanics of Materials
  • Mechanical Engineering

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  • Cite this

    Chen, T. H., Hsieh, P. T., Huang, C. Y., Wang, J. Q., & Chuang, R. W. (2010). Investigation on the mechanical properties of molybdenum-doped zinc oxide transparent thin film by sputtering technique. In PRICM7 (pp. 1756-1759). (Materials Science Forum; Vol. 654-656). Trans Tech Publications Ltd. https://doi.org/10.4028/www.scientific.net/MSF.654-656.1756