TY - GEN
T1 - Investigation on the mechanical properties of molybdenum-doped zinc oxide transparent thin film by sputtering technique
AU - Chen, Tao Hsing
AU - Hsieh, Po Tsung
AU - Huang, Chao Yu
AU - Wang, Ji Quan
AU - Chuang, Ricky Wenkuei
N1 - Copyright:
Copyright 2020 Elsevier B.V., All rights reserved.
PY - 2010
Y1 - 2010
N2 - Zinc oxide thin films were prepared on the glass substrate by rf-magnetron sputtering technique and their structural, optical, and mechanical characteristics were then investigated. As the SEM images have revealed, the average grain size of ZMO thin film are influenced by pressure and sputter power, and the average value of the grain size is about 30∼50 nm. The EDS analysis also revealed a successful doping of Mo in ZnO thin film. The transmittance property of ZMO thin film exhibited an excellent transparency in the visible range, where the transmittance was about 90% for ZMO film with Mo. Moreover, good transmittance was also demonstrated in the range of 350nm to 400nm (UV regime). Finally, the nano-mechanical properties of ZMO thin films were investigated using a nanoindentation technique. The corresponding result would show that the Young's modulus and hardness both increased with decreasing pressure.
AB - Zinc oxide thin films were prepared on the glass substrate by rf-magnetron sputtering technique and their structural, optical, and mechanical characteristics were then investigated. As the SEM images have revealed, the average grain size of ZMO thin film are influenced by pressure and sputter power, and the average value of the grain size is about 30∼50 nm. The EDS analysis also revealed a successful doping of Mo in ZnO thin film. The transmittance property of ZMO thin film exhibited an excellent transparency in the visible range, where the transmittance was about 90% for ZMO film with Mo. Moreover, good transmittance was also demonstrated in the range of 350nm to 400nm (UV regime). Finally, the nano-mechanical properties of ZMO thin films were investigated using a nanoindentation technique. The corresponding result would show that the Young's modulus and hardness both increased with decreasing pressure.
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U2 - 10.4028/www.scientific.net/MSF.654-656.1756
DO - 10.4028/www.scientific.net/MSF.654-656.1756
M3 - Conference contribution
AN - SCOPUS:77955490793
SN - 0878492550
SN - 9780878492558
T3 - Materials Science Forum
SP - 1756
EP - 1759
BT - PRICM7
PB - Trans Tech Publications Ltd
T2 - 7th Pacific Rim International Conference on Advanced Materials and Processing, PRICM-7
Y2 - 2 August 2010 through 6 August 2010
ER -