Investigations of novel Γ-gate MOS-HEMTs by ozone water oxidation and shifted exposure techniques

Ching Sung Lee, Bo Yi Chou, Sheng Han Yang, Wei Chou Hsu, Chang Luen Wu, Wen Luh Yang, Don Gey Liu, Ming Yuan Lin

Research output: Contribution to journal › Article › peer-review

11 Citations (Scopus)

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Chemical Compounds

Engineering & Materials Science