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IR laser-assisted micro/nano-imprinting
Chun Hung Chen
,
Chuan Pu Liu
,
Yung Chun Lee
, Fei Bin Hsiao
, Cheng Yu Chiu
, Ming Hung Chung
, Ming Hsueh Chiang
Department of Materials Science and Engineering
International Curriculum for Advanced Materials Program
Master Degree Program on Nano-Integrated-Circuit Engineering
Department of Mechanical Engineering
Research output
:
Contribution to journal
›
Article
›
peer-review
18
Citations (Scopus)
Overview
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Keyphrases
IR Laser
100%
Si Mold
33%
Infrared Pulses
33%
Photoresist Films
33%
Direct Imprinting
33%
Mold Fabrication
33%
Material Science
Silicon
100%
Laser Pulse
50%
Film
25%
Engineering
Infrared Laser
100%
Laser Pulse Energy
33%