Isopropyl alcohol sensors of CuO nanotubes by thermal oxidation of copper films on glass

Han Ting Hsueh; Shoou Jinn Chang; Fei Yi Hung; Wen Yin Weng; S. P. Chang; T. J. Hsueh; Cheng Liang Hsu; Bau Tong Dai

doi:10.1109/JSEN.2011.2155645

Isopropyl alcohol sensors of CuO nanotubes by thermal oxidation of copper films on glass

Han Ting Hsueh, Shoou Jinn Chang, Fei Yi Hung, Wen Yin Weng, S. P. Chang, T. J. Hsueh, Cheng Liang Hsu, Bau Tong Dai

Research output: Contribution to journal › Article › peer-review

7 Citations (Scopus)

Abstract

The growth of CuO nanotubes on Cu/CuO/glass templates is reported. It was found that porous structures were formed at the interface between sputtered CuO film and Cu layer after annealing. The average length of the nanotubes and thickness of the porous structure both increased monotonically as we increased the initial thickness of the copper film. The CuO nanotubes were used to fabricate isopropyl alcohol (IPA) sensors. With a 5-V applied bias, the current became smaller as the IPA was injected into the sealed test chamber. Furthermore, the measured response was larger for the sensors with longer CuO nanotubes.

Original language	English
Article number	5770164
Pages (from-to)	3276-3282
Number of pages	7
Journal	IEEE Sensors Journal
Volume	11
Issue number	12
DOIs	https://doi.org/10.1109/JSEN.2011.2155645
Publication status	Published - 2011

All Science Journal Classification (ASJC) codes

Instrumentation
Electrical and Electronic Engineering

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10.1109/JSEN.2011.2155645

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@article{45a7899fa0c649d9b1b4c95f5f6a85cb,

title = "Isopropyl alcohol sensors of CuO nanotubes by thermal oxidation of copper films on glass",

abstract = "The growth of CuO nanotubes on Cu/CuO/glass templates is reported. It was found that porous structures were formed at the interface between sputtered CuO film and Cu layer after annealing. The average length of the nanotubes and thickness of the porous structure both increased monotonically as we increased the initial thickness of the copper film. The CuO nanotubes were used to fabricate isopropyl alcohol (IPA) sensors. With a 5-V applied bias, the current became smaller as the IPA was injected into the sealed test chamber. Furthermore, the measured response was larger for the sensors with longer CuO nanotubes.",

author = "Hsueh, {Han Ting} and Chang, {Shoou Jinn} and Hung, {Fei Yi} and Weng, {Wen Yin} and Chang, {S. P.} and Hsueh, {T. J.} and Hsu, {Cheng Liang} and Dai, {Bau Tong}",

note = "Funding Information: Manuscript received January 11, 2011; accepted May 09, 2011. Date of publication May 19, 2011; date of current version November 02, 2011. This work was supported in part by the Center for Micro/Nano Science and Technology and the Advanced Optoelectronic Technology Center, National Cheng Kung University, under projects from the Ministry of Education, TAIWAN, and by the Bureau of Energy, Ministry of Economic Affairs of Taiwan, under Contract 98-D0204-6. The associate editor coordinating the review of this manuscript and approving it for publication was Prof. Gerald Gerlach.",

year = "2011",

doi = "10.1109/JSEN.2011.2155645",

language = "English",

volume = "11",

pages = "3276--3282",

journal = "IEEE Sensors Journal",

issn = "1530-437X",

publisher = "Institute of Electrical and Electronics Engineers Inc.",

number = "12",

}

TY - JOUR

T1 - Isopropyl alcohol sensors of CuO nanotubes by thermal oxidation of copper films on glass

AU - Hsueh, Han Ting

AU - Chang, Shoou Jinn

AU - Hung, Fei Yi

AU - Weng, Wen Yin

AU - Chang, S. P.

AU - Hsueh, T. J.

AU - Hsu, Cheng Liang

AU - Dai, Bau Tong

N1 - Funding Information: Manuscript received January 11, 2011; accepted May 09, 2011. Date of publication May 19, 2011; date of current version November 02, 2011. This work was supported in part by the Center for Micro/Nano Science and Technology and the Advanced Optoelectronic Technology Center, National Cheng Kung University, under projects from the Ministry of Education, TAIWAN, and by the Bureau of Energy, Ministry of Economic Affairs of Taiwan, under Contract 98-D0204-6. The associate editor coordinating the review of this manuscript and approving it for publication was Prof. Gerald Gerlach.

PY - 2011

Y1 - 2011

N2 - The growth of CuO nanotubes on Cu/CuO/glass templates is reported. It was found that porous structures were formed at the interface between sputtered CuO film and Cu layer after annealing. The average length of the nanotubes and thickness of the porous structure both increased monotonically as we increased the initial thickness of the copper film. The CuO nanotubes were used to fabricate isopropyl alcohol (IPA) sensors. With a 5-V applied bias, the current became smaller as the IPA was injected into the sealed test chamber. Furthermore, the measured response was larger for the sensors with longer CuO nanotubes.

AB - The growth of CuO nanotubes on Cu/CuO/glass templates is reported. It was found that porous structures were formed at the interface between sputtered CuO film and Cu layer after annealing. The average length of the nanotubes and thickness of the porous structure both increased monotonically as we increased the initial thickness of the copper film. The CuO nanotubes were used to fabricate isopropyl alcohol (IPA) sensors. With a 5-V applied bias, the current became smaller as the IPA was injected into the sealed test chamber. Furthermore, the measured response was larger for the sensors with longer CuO nanotubes.

UR - http://www.scopus.com/inward/record.url?scp=80455155203&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=80455155203&partnerID=8YFLogxK

U2 - 10.1109/JSEN.2011.2155645

DO - 10.1109/JSEN.2011.2155645

M3 - Article

AN - SCOPUS:80455155203

SN - 1530-437X

VL - 11

SP - 3276

EP - 3282

JO - IEEE Sensors Journal

JF - IEEE Sensors Journal

IS - 12

M1 - 5770164

ER -

Isopropyl alcohol sensors of CuO nanotubes by thermal oxidation of copper films on glass

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All Science Journal Classification (ASJC) codes

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