Iterative Control of Dynamics-Coupling-Caused Errors in Piezoscanners During High-Speed AFM Operation

Szuchi Tien, Santosh Devasia, Qingze Zou

Research output: Contribution to journalArticlepeer-review

216 Citations (Scopus)


This paper addresses the compensation of the dynamics-coupling effect in piezoscanners used for positioning in atomic force microscopes (AFMs). Piezoscanners are used to position the AFM probe, relative to the sample, both parallel to the sample surface (x and y axes) and perpendicular to the sample surface (z axis). In this paper, we show that dynamics-coupling from the scan axes (x and y axes) to the perpendicular z axis can generate significant positioning errors during high-speed AFM operation, i.e., when the sample is scanned at high speed. We use an inversion-based iterative control approach to compensate for this dynamics-coupling effect. Convergence of the iterative approach is investigated and experimental results show that the dynamics-coupling-caused error can be reduced, close to the noise level, using the proposed approach. Thus, the main contribution of this paper is the development of an approach to substantially reduce the dynamics-coupling-caused error and thereby, to enable high-speed AFM operation.

Original languageEnglish
Pages (from-to)921-931
Number of pages11
JournalIEEE Transactions on Control Systems Technology
Issue number6
Publication statusPublished - 2005 Nov

All Science Journal Classification (ASJC) codes

  • Control and Systems Engineering
  • Electrical and Electronic Engineering


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