Kinetic mechanism for the transformation of single-layer steps into double-layer steps by Si deposition on a vicinal Si(100) surface

Zhenyu Zhang, Yan Ten Lu, Horia Metiu

Research output: Contribution to journalArticlepeer-review

32 Citations (Scopus)

Abstract

We perform energy calculations with the Stillinger-Weber potential to determine how the Si atoms deposited on a Si(100) surface with single-layer steps migrate to produce a surface with double-layer steps, and why the system does not evolve by the usual step flow mechanism.

Original languageEnglish
Pages (from-to)1917-1920
Number of pages4
JournalPhysical Review B
Volume46
Issue number3
DOIs
Publication statusPublished - 1992

All Science Journal Classification (ASJC) codes

  • Condensed Matter Physics

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