Laser assisted roller imprinting

Yung Chun Lee, Cheng Yu Chiu, Fei Bin Hsiao

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

This paper presents a new roller-based nanoimprinting method based on the laser assisted direct imprint (LADI) technique. Similar to LADI, it utilizes a high-energy pulse laser to melt the silicon substrate and a pre-loaded quartz mold to imprint nano-patterns into the substrate. However, a cylindrical roller made of highly transparent silica is introduced in this new method. Optically, the roller is acting like a cylindrical lens which can focus the laser beam into a line source at the mode/substrate interface. Mechanically, the roller provides a constant line-type contact pressure between the mold and substrate. With this innovative roller design, the laser-assisted imprint process can be carried out in a smooth and continuous way and therefore open the possibility for large-area nanoimprinting and faster imprinting speed. A prototype setup of this laser-assisted roller imprinting (LARI) has been constructed and the experimental results are successfully obtained.

Original languageEnglish
Title of host publicationProceedings of the 2nd IEEE International Conference on Nano/Micro Engineered and Molecular Systems, IEEE NEMS 2007
Pages731-734
Number of pages4
DOIs
Publication statusPublished - 2007 Aug 28
Event2007 2nd IEEE International Conference on Nano/Micro Engineered and Molecular Systems, IEEE NEMS 2007 - Bangkok, Thailand
Duration: 2007 Jan 162007 Jan 19

Publication series

NameProceedings of the 2nd IEEE International Conference on Nano/Micro Engineered and Molecular Systems, IEEE NEMS 2007

Other

Other2007 2nd IEEE International Conference on Nano/Micro Engineered and Molecular Systems, IEEE NEMS 2007
CountryThailand
CityBangkok
Period07-01-1607-01-19

All Science Journal Classification (ASJC) codes

  • Computer Networks and Communications
  • Computer Science Applications
  • Electrical and Electronic Engineering

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