Laser assisted roller imprinting

Yung Chun Lee; Cheng Yu Chiu; Fei Bin Hsiao

doi:10.1109/NEMS.2007.352122

Laser assisted roller imprinting

Yung Chun Lee
, Cheng Yu Chiu
, Fei Bin Hsiao

Department of Mechanical Engineering

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Abstract

This paper presents a new roller-based nanoimprinting method based on the laser assisted direct imprint (LADI) technique. Similar to LADI, it utilizes a high-energy pulse laser to melt the silicon substrate and a pre-loaded quartz mold to imprint nano-patterns into the substrate. However, a cylindrical roller made of highly transparent silica is introduced in this new method. Optically, the roller is acting like a cylindrical lens which can focus the laser beam into a line source at the mode/substrate interface. Mechanically, the roller provides a constant line-type contact pressure between the mold and substrate. With this innovative roller design, the laser-assisted imprint process can be carried out in a smooth and continuous way and therefore open the possibility for large-area nanoimprinting and faster imprinting speed. A prototype setup of this laser-assisted roller imprinting (LARI) has been constructed and the experimental results are successfully obtained.

Original language	English
Title of host publication	Proceedings of the 2nd IEEE International Conference on Nano/Micro Engineered and Molecular Systems, IEEE NEMS 2007
Pages	731-734
Number of pages	4
DOIs	https://doi.org/10.1109/NEMS.2007.352122
Publication status	Published - 2007
Event	2007 2nd IEEE International Conference on Nano/Micro Engineered and Molecular Systems, IEEE NEMS 2007 - Bangkok, Thailand Duration: 2007 Jan 16 → 2007 Jan 19

Publication series

Name	Proceedings of the 2nd IEEE International Conference on Nano/Micro Engineered and Molecular Systems, IEEE NEMS 2007

Other

Other	2007 2nd IEEE International Conference on Nano/Micro Engineered and Molecular Systems, IEEE NEMS 2007
Country/Territory	Thailand
City	Bangkok
Period	07-01-16 → 07-01-19

All Science Journal Classification (ASJC) codes

Computer Networks and Communications
Computer Science Applications
Electrical and Electronic Engineering

Access to Document

10.1109/NEMS.2007.352122

Cite this

Lee, Y. C., Chiu, C. Y., & Hsiao, F. B. (2007). Laser assisted roller imprinting. In Proceedings of the 2nd IEEE International Conference on Nano/Micro Engineered and Molecular Systems, IEEE NEMS 2007 (pp. 731-734). Article 4160425 (Proceedings of the 2nd IEEE International Conference on Nano/Micro Engineered and Molecular Systems, IEEE NEMS 2007). https://doi.org/10.1109/NEMS.2007.352122

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title = "Laser assisted roller imprinting",

abstract = "This paper presents a new roller-based nanoimprinting method based on the laser assisted direct imprint (LADI) technique. Similar to LADI, it utilizes a high-energy pulse laser to melt the silicon substrate and a pre-loaded quartz mold to imprint nano-patterns into the substrate. However, a cylindrical roller made of highly transparent silica is introduced in this new method. Optically, the roller is acting like a cylindrical lens which can focus the laser beam into a line source at the mode/substrate interface. Mechanically, the roller provides a constant line-type contact pressure between the mold and substrate. With this innovative roller design, the laser-assisted imprint process can be carried out in a smooth and continuous way and therefore open the possibility for large-area nanoimprinting and faster imprinting speed. A prototype setup of this laser-assisted roller imprinting (LARI) has been constructed and the experimental results are successfully obtained.",

author = "Lee, \{Yung Chun\} and Chiu, \{Cheng Yu\} and Hsiao, \{Fei Bin\}",

year = "2007",

doi = "10.1109/NEMS.2007.352122",

language = "English",

isbn = "1424406102",

series = "Proceedings of the 2nd IEEE International Conference on Nano/Micro Engineered and Molecular Systems, IEEE NEMS 2007",

pages = "731--734",

booktitle = "Proceedings of the 2nd IEEE International Conference on Nano/Micro Engineered and Molecular Systems, IEEE NEMS 2007",

note = "2007 2nd IEEE International Conference on Nano/Micro Engineered and Molecular Systems, IEEE NEMS 2007 ; Conference date: 16-01-2007 Through 19-01-2007",

}

Lee, YC, Chiu, CY & Hsiao, FB 2007, Laser assisted roller imprinting. in Proceedings of the 2nd IEEE International Conference on Nano/Micro Engineered and Molecular Systems, IEEE NEMS 2007., 4160425, Proceedings of the 2nd IEEE International Conference on Nano/Micro Engineered and Molecular Systems, IEEE NEMS 2007, pp. 731-734, 2007 2nd IEEE International Conference on Nano/Micro Engineered and Molecular Systems, IEEE NEMS 2007, Bangkok, Thailand, 07-01-16. https://doi.org/10.1109/NEMS.2007.352122

Laser assisted roller imprinting. / Lee, Yung Chun; Chiu, Cheng Yu; Hsiao, Fei Bin.
Proceedings of the 2nd IEEE International Conference on Nano/Micro Engineered and Molecular Systems, IEEE NEMS 2007. 2007. p. 731-734 4160425 (Proceedings of the 2nd IEEE International Conference on Nano/Micro Engineered and Molecular Systems, IEEE NEMS 2007).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

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AB - This paper presents a new roller-based nanoimprinting method based on the laser assisted direct imprint (LADI) technique. Similar to LADI, it utilizes a high-energy pulse laser to melt the silicon substrate and a pre-loaded quartz mold to imprint nano-patterns into the substrate. However, a cylindrical roller made of highly transparent silica is introduced in this new method. Optically, the roller is acting like a cylindrical lens which can focus the laser beam into a line source at the mode/substrate interface. Mechanically, the roller provides a constant line-type contact pressure between the mold and substrate. With this innovative roller design, the laser-assisted imprint process can be carried out in a smooth and continuous way and therefore open the possibility for large-area nanoimprinting and faster imprinting speed. A prototype setup of this laser-assisted roller imprinting (LARI) has been constructed and the experimental results are successfully obtained.

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Laser assisted roller imprinting

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