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Lithium cobalt oxide cathode film prepared by rf sputtering
Cheng Lung Liao,
Kuan-Zong Fung
Department of Materials Science and Engineering
International Curriculum for Advanced Materials Program
Research output
:
Contribution to journal
›
Article
›
peer-review
91
Citations (Scopus)
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Engineering & Materials Science
Annealing
22%
Cathodes
68%
Cobalt
79%
Crystallization
24%
Flow of gases
11%
Flow rate
8%
Heat treatment
9%
Lithium
76%
Magnetron sputtering
15%
Oxidation-Reduction
15%
Oxides
58%
Partial pressure
13%
Silicon
9%
Sputtering
87%
Temperature
13%
Thin films
21%
Physics & Astronomy
annealing
13%
cathodes
55%
cobalt oxides
92%
crystallization
17%
flow velocity
9%
gas flow
10%
grain size
8%
heat treatment
9%
lithium oxides
100%
magnetron sputtering
9%
nanostructure (characteristics)
14%
oxygen
6%
partial pressure
11%
radio frequencies
9%
silicon
6%
sputtering
53%
temperature
6%
thin films
11%
Chemical Compounds
Annealing
15%
Cathode
50%
Crystallization
13%
Flow Kinetics
7%
Grain Size
9%
Heat Treatment
8%
Liquid Film
33%
Magnetron Sputtering
11%
Oxide
37%
Partial Pressure
9%
Pressure
5%
Sputtering
74%