Local neutron transmutation doping using isotopically enriched silicon film

Yoichi Yamada, Hiroyuki Yamamoto, Hironori Ohba, Masato Sasase, Fumitaka Esaka, Kenji Yamaguchi, Haruhiko Udono, Shin ichi Shamoto, Atsushi Yokoyama, Kiichi Hojou

Research output: Contribution to journalArticlepeer-review

8 Citations (Scopus)

Abstract

By means of thermal neutron irradiation on nanostructure fabricated from 30Si-enriched material, the nanoregion can be selectively and homogeneously doped with 31P owing to the nuclear transmutation of 30Si→31P (local neutron transmutation doping, NTD). In order to demonstrate the capability of local NTD, 30Si-enriched silicon film is fabricated on p-Si(1 0 0) and irradiated by thermal neutrons. Upon the irradiation, film is n-doped while the substrate remains p-type, resulting in a formation of a p-n junction at film-substrate interface showing a rectification. This suggests strong possibility for application of the NTD for nano-scaled semiconductor devices.

Original languageEnglish
Pages (from-to)2204-2208
Number of pages5
JournalJournal of Physics and Chemistry of Solids
Volume68
Issue number11
DOIs
Publication statusPublished - 2007 Nov

All Science Journal Classification (ASJC) codes

  • Chemistry(all)
  • Materials Science(all)
  • Condensed Matter Physics

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