Low-Pressure Hybrid Chemical Vapor Growth for Efficient Perovskite Solar Cells and Large-Area Module

Vapor-based deposition technique is considered as a promising approach for preparing a high-quality and uniform perovskite thin film. With evolution from coevaporation deposition to a low-pressure vapor-assisted solution process, both energy budget and reaction yield for perovskite film fabrications are improved. In this paper, a low-pressure hybrid chemical vapor deposition (LPHCVD) method is applied to fabricate CH₃NH₃PbI₃ perovskite films. The crucial dependence of working pressure on the perovskite formation is revealed. Moreover, the reaction time plays an important role in controlling the quality of the synthesized perovskite film. Efficient perovskite solar cells of 14.99% (mesoscopic), 15.37% (planar), and perovskite modules (active area of 8.4 cm²) of 6.22% are achieved by this LPHCVD method.