@inproceedings{dc58aa3eda8a465091c1813cbcc7d510,
title = "Low subthreshold swing InGaZnO thin film transistors with UV-Ozone-Treated BaTi03 dielectric layers",
abstract = "We developed a method to improve the electrical performance of amorphous BaTiO3 thin film by UV-ozone treatment. The treatment promoted densification of the dielectric layer by decreasing oxygen-vacancy and increasing metal-oxide bonds. The InGaZnO-TFTs exhibited high on/off ratio of 1.46 ∗ 107 and the low sub-threshold swing of 0.069 V/dec.",
author = "Liou, {Huei Yu} and Cheng, {An Hsiu} and Chu, {Sheng Yuan}",
year = "2016",
month = jan,
day = "1",
language = "English",
series = "23rd International Display Workshops in conjunction with Asia Display, IDW/AD 2016",
publisher = "Society for Information Display",
pages = "882--885",
booktitle = "23rd International Display Workshops in conjunction with Asia Display, IDW/AD 2016",
address = "United States",
note = "23rd International Display Workshops in conjunction with Asia Display, IDW/AD 2016 ; Conference date: 07-12-2016 Through 09-12-2016",
}