Low temperature a-sige: H near-IR sensor and photovoltaic devices for flexible multi-functional panel

Ming Hsuan Kao, Jia Min Shieh, Chang Hong Shen, Peichen Yu, Hao Chung Kuo, Ching Ting Lee, Fu Liang Yang

Research output: Chapter in Book/Report/Conference proceedingConference contribution

1 Citation (Scopus)

Abstract

High Near-IR response photo-diode (0.1A/W@800nm) and high efficiency a- Si/a-SiGe tandem solar cell (8.38%) were demonstrated using high-density plasmafabricated a-SiGe:H deposition technology with Si2H6 and GeH4 precursor. The low temperature (140oC) a-SiGe:H films with low defect density (2.3x1016cm-3)are suitable for the applications of flexible solar self-powered multi-functional panel and 3D stacked monolithic devices.

Original languageEnglish
Title of host publicationConference on Lasers and Electro Optics, CLEO
Subtitle of host publicationApplications and Technology, CLEO_AT 2013
PagesATh4N.3
Publication statusPublished - 2013
EventCLEO: Applications and Technology, CLEO_AT 2013 - San Jose, CA, United States
Duration: 2013 Jun 92013 Jun 14

Publication series

NameCLEO: Applications and Technology, CLEO_AT 2013

Other

OtherCLEO: Applications and Technology, CLEO_AT 2013
CountryUnited States
CitySan Jose, CA
Period13-06-0913-06-14

All Science Journal Classification (ASJC) codes

  • Computer Networks and Communications
  • Electrical and Electronic Engineering
  • Electronic, Optical and Magnetic Materials
  • Atomic and Molecular Physics, and Optics

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