Low temperature a-SiGe:H Near-IR sensor and photovoltaic devices for flexible multi-functional panel

Ming Hsuan Kao, Jia Min Shieh, Chang Hong Shen, Peichen Yu, Hao Chung Kuo, Ching Ting Lee, Fu Liang Yang

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

High Near-IR response photo-diode (0.1A/W@800nm) and high efficiency a-Si/a-SiGe tandem solar cell (8.38%) were demonstrated using high-density plasmafabricated a-SiGe:H deposition technology with Si2H6 and GeH4 precursor. The low temperature (140°C) a-SiGe:H films with low defect density (2.3×1016cm -3)are suitable for the applications of flexible solar self-powered multi-functional panel and 3D stacked monolithic devices.

Original languageEnglish
Title of host publication2013 Conference on Lasers and Electro-Optics, CLEO 2013
PublisherIEEE Computer Society
ISBN (Print)9781557529725
DOIs
Publication statusPublished - 2013
Event2013 Conference on Lasers and Electro-Optics, CLEO 2013 - San Jose, CA, United States
Duration: 2013 Jun 92013 Jun 14

Publication series

Name2013 Conference on Lasers and Electro-Optics, CLEO 2013

Other

Other2013 Conference on Lasers and Electro-Optics, CLEO 2013
CountryUnited States
CitySan Jose, CA
Period13-06-0913-06-14

All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials

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    Kao, M. H., Shieh, J. M., Shen, C. H., Yu, P., Kuo, H. C., Lee, C. T., & Yang, F. L. (2013). Low temperature a-SiGe:H Near-IR sensor and photovoltaic devices for flexible multi-functional panel. In 2013 Conference on Lasers and Electro-Optics, CLEO 2013 [6832989] (2013 Conference on Lasers and Electro-Optics, CLEO 2013). IEEE Computer Society. https://doi.org/10.1364/cleo_at.2013.ath4n.3