Low temperature Au-Au bonding with VUV/O 3 treatment

  • Akiko Okada
  • , Masatsugu Nimura
  • , Naoko Unami
  • , Akitsu Shigetou
  • , Hirokazu Noma
  • , Katsuyuki Sakuma
  • , Jun Mizuno
  • , Shuichi Shoji

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

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