Low-temperature CVD carbon coatings on glass plates for flat panel display applications

Y. Tzeng, C. Liu, C. Cutshaw, Z. Chen

Research output: Contribution to journalConference articlepeer-review

Abstract

Low-temperature chemical vapour deposition processes were studied for coating carbon films on metal-coated glass plates. Thermal CVD in hydrocarbon mixtures was used for carbon deposition at temperatures between 300°C and 550°C. Carbon deposited on metal coated glass plates were examined by SEM and analyzed using a pin to disk setup in an ultra high vacuum chamber for measuring the electron emission characteristics. Using a one-millimeter diameter tungsten rod with a hemispherical tip as the anode while the carbon coatings as the cathode, current-voltage characteristics of the carbon coatings were measured and used for calculating the electric field at which electron emission started as well as calculating the field enhancement factor of the carbon coatings. Field emission of electrons from carbon coatings starting from an electric field as low as 1.4 volts per micrometer has been achieved.

Original languageEnglish
Pages (from-to)Q221-Q225
JournalMaterials Research Society Symposium - Proceedings
Volume621
DOIs
Publication statusPublished - 2000
EventElectron-Emissive Materials, Vacuum Microelectronics and Flat-Panel Displays - San Francisco, CA, United States
Duration: 2000 Apr 252000 Apr 27

All Science Journal Classification (ASJC) codes

  • Materials Science(all)
  • Condensed Matter Physics
  • Mechanics of Materials
  • Mechanical Engineering

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