Low temperature fabrication of conductive silver lines and dots via transfer-printing and nanoimprinting lithography techniques

Chun Chang Wu, Steve Lien Chung Hsu, Ching Wei Chiu, Jung Tang Wu

Research output: Contribution to journalArticle

1 Citation (Scopus)

Abstract

In this work, we have developed novel methods to fabricate conductive silver tracks and dots directly from silver nitrate solution by transfer-printing and nanoimprinting lithography techniques, which are inexpensive and can be scaled down to the nanometer scale. The silver nitrate precursor can be reduced in ethylene glycol vapor to form silver at low temperatures. Energy dispersive spectrometric analysis results indicate that the silver nitrate has been converted to silver completely. In order to obtain smooth and continuous conductive patterned silver features with high resolution, the silver lines with widths of a few tens of micrometers to nanometers were patterned by using a spin-coating approach. Using a 14 M silver nitrate solution, continuous silver conductive lines with a resistivity of 8.45 × 10-5 Ω cm has been produced.

Original languageEnglish
Article number085026
JournalJournal of Micromechanics and Microengineering
Volume23
Issue number8
DOIs
Publication statusPublished - 2013 Aug 1

All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Mechanics of Materials
  • Mechanical Engineering
  • Electrical and Electronic Engineering

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