Low-temperature growth of gallium nitride films by inductively coupled-plasma-enhanced reactive magnetron sputtering

Chih Jui Ni, Franklin Chau-Nan Hong

Research output: Contribution to journalArticlepeer-review

6 Citations (Scopus)

Fingerprint

Dive into the research topics of 'Low-temperature growth of gallium nitride films by inductively coupled-plasma-enhanced reactive magnetron sputtering'. Together they form a unique fingerprint.

Engineering & Materials Science

Chemical Compounds

Physics & Astronomy