Low-temperature growth of Si-nanostructures by laser assistance of conventional plasma enhanced chemical vapor deposition

Chun Hung Lin; Ching Ting Lee

doi:10.1109/CLEOPR.2003.1277289

Low-temperature growth of Si-nanostructures by laser assistance of conventional plasma enhanced chemical vapor deposition

Chun Hung Lin, Ching Ting Lee

Department of Photonics

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Abstract

We utilize a CO₂ laser in the deposition process because SiH₄ molecules have high photon absorption of laser light. This absorption increases the decomposition of SiH₄ molecules and helps form the Si-nanostructures in low-temperature growth.

Original language	English
Title of host publication	CLEO/Pacific Rim 2003 - 5th Pacific Rim Conference on Lasers and Electro-Optics
Subtitle of host publication	Photonics Lights Innovation, from Nano-Structures and Devices to Systems and Networks, Proceedings
Publisher	Institute of Electrical and Electronics Engineers Inc.
Number of pages	1
ISBN (Electronic)	0780377664
DOIs	https://doi.org/10.1109/CLEOPR.2003.1277289
Publication status	Published - 2003 Jan 1
Event	5th Pacific Rim Conference on Lasers and Electro-Optics, CLEO/Pacific Rim 2003 - Taipei, Taiwan Duration: 2003 Dec 15 → 2003 Dec 19

Publication series

Name	Pacific Rim Conference on Lasers and Electro-Optics, CLEO - Technical Digest
Volume	2

Other

Other	5th Pacific Rim Conference on Lasers and Electro-Optics, CLEO/Pacific Rim 2003
Country/Territory	Taiwan
City	Taipei
Period	03-12-15 → 03-12-19

All Science Journal Classification (ASJC) codes

Electronic, Optical and Magnetic Materials
Atomic and Molecular Physics, and Optics
Condensed Matter Physics
Electrical and Electronic Engineering

Access to Document

10.1109/CLEOPR.2003.1277289

Cite this

Lin, C. H., & Lee, C. T. (2003). Low-temperature growth of Si-nanostructures by laser assistance of conventional plasma enhanced chemical vapor deposition. In CLEO/Pacific Rim 2003 - 5th Pacific Rim Conference on Lasers and Electro-Optics: Photonics Lights Innovation, from Nano-Structures and Devices to Systems and Networks, Proceedings [1277289] (Pacific Rim Conference on Lasers and Electro-Optics, CLEO - Technical Digest; Vol. 2). Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/CLEOPR.2003.1277289

Lin, Chun Hung ; Lee, Ching Ting. / Low-temperature growth of Si-nanostructures by laser assistance of conventional plasma enhanced chemical vapor deposition. CLEO/Pacific Rim 2003 - 5th Pacific Rim Conference on Lasers and Electro-Optics: Photonics Lights Innovation, from Nano-Structures and Devices to Systems and Networks, Proceedings. Institute of Electrical and Electronics Engineers Inc., 2003. (Pacific Rim Conference on Lasers and Electro-Optics, CLEO - Technical Digest).

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title = "Low-temperature growth of Si-nanostructures by laser assistance of conventional plasma enhanced chemical vapor deposition",

abstract = "We utilize a CO2 laser in the deposition process because SiH4 molecules have high photon absorption of laser light. This absorption increases the decomposition of SiH4 molecules and helps form the Si-nanostructures in low-temperature growth.",

author = "Lin, {Chun Hung} and Lee, {Ching Ting}",

year = "2003",

month = jan,

day = "1",

doi = "10.1109/CLEOPR.2003.1277289",

language = "English",

series = "Pacific Rim Conference on Lasers and Electro-Optics, CLEO - Technical Digest",

publisher = "Institute of Electrical and Electronics Engineers Inc.",

booktitle = "CLEO/Pacific Rim 2003 - 5th Pacific Rim Conference on Lasers and Electro-Optics",

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note = "5th Pacific Rim Conference on Lasers and Electro-Optics, CLEO/Pacific Rim 2003 ; Conference date: 15-12-2003 Through 19-12-2003",

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Lin, CH & Lee, CT 2003, Low-temperature growth of Si-nanostructures by laser assistance of conventional plasma enhanced chemical vapor deposition. in CLEO/Pacific Rim 2003 - 5th Pacific Rim Conference on Lasers and Electro-Optics: Photonics Lights Innovation, from Nano-Structures and Devices to Systems and Networks, Proceedings., 1277289, Pacific Rim Conference on Lasers and Electro-Optics, CLEO - Technical Digest, vol. 2, Institute of Electrical and Electronics Engineers Inc., 5th Pacific Rim Conference on Lasers and Electro-Optics, CLEO/Pacific Rim 2003, Taipei, Taiwan, 03-12-15. https://doi.org/10.1109/CLEOPR.2003.1277289

Low-temperature growth of Si-nanostructures by laser assistance of conventional plasma enhanced chemical vapor deposition. / Lin, Chun Hung; Lee, Ching Ting.

CLEO/Pacific Rim 2003 - 5th Pacific Rim Conference on Lasers and Electro-Optics: Photonics Lights Innovation, from Nano-Structures and Devices to Systems and Networks, Proceedings. Institute of Electrical and Electronics Engineers Inc., 2003. 1277289 (Pacific Rim Conference on Lasers and Electro-Optics, CLEO - Technical Digest; Vol. 2).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

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N2 - We utilize a CO2 laser in the deposition process because SiH4 molecules have high photon absorption of laser light. This absorption increases the decomposition of SiH4 molecules and helps form the Si-nanostructures in low-temperature growth.

AB - We utilize a CO2 laser in the deposition process because SiH4 molecules have high photon absorption of laser light. This absorption increases the decomposition of SiH4 molecules and helps form the Si-nanostructures in low-temperature growth.

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T3 - Pacific Rim Conference on Lasers and Electro-Optics, CLEO - Technical Digest

BT - CLEO/Pacific Rim 2003 - 5th Pacific Rim Conference on Lasers and Electro-Optics

PB - Institute of Electrical and Electronics Engineers Inc.

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Y2 - 15 December 2003 through 19 December 2003

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Lin CH, Lee CT. Low-temperature growth of Si-nanostructures by laser assistance of conventional plasma enhanced chemical vapor deposition. In CLEO/Pacific Rim 2003 - 5th Pacific Rim Conference on Lasers and Electro-Optics: Photonics Lights Innovation, from Nano-Structures and Devices to Systems and Networks, Proceedings. Institute of Electrical and Electronics Engineers Inc. 2003. 1277289. (Pacific Rim Conference on Lasers and Electro-Optics, CLEO - Technical Digest). doi: 10.1109/CLEOPR.2003.1277289

Low-temperature growth of Si-nanostructures by laser assistance of conventional plasma enhanced chemical vapor deposition

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