Low temperature synthesis of single crystalline silicon nanowires using anodic aluminum oxide template

Chien Wei Liu, Cheng Yung Kuo, Chuan Po Wang, Shiuan Hua Shiau, Chie Gau, Bau Tong Dai

Research output: Contribution to journalArticle

5 Citations (Scopus)

Abstract

Single crystalline slilicon nanowires (SiNWs) arrays were grown successfully on a silicon substrate by the chemical vapor deposition (CVD) process at a very low temperature of 400 °C. This was made possible by combined use of gold nanoparticles as catalyst and anodic aluminum oxide (AAO) as template. The AAO template was fabricated on the substrate with predeposited gold nanoparticles. Various analytical instruments were used to identify and discuss the growth mechanism and the structure of the SiNWs. The energy dispersive X-ray spectrometer (EDS) spectrum of a single SiNW shows existence of alumina in the gold metal tip. This clearly indicates participation of AAO in the metal tip to enhance the growth process. Further discussion on the measurement results for the crystalline structure of the SiNWs is presented.

Original languageEnglish
Pages (from-to)6343-6345
Number of pages3
JournalJapanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers
Volume46
Issue number9 B
DOIs
Publication statusPublished - 2007 Sep 20

All Science Journal Classification (ASJC) codes

  • Physics and Astronomy (miscellaneous)

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