Magnesium zirconate titanate thin films used as an no₂ sensing layer for gas sensor applications developed using a sol–gel method

Magnesium zirconate titanate (MZT) thin films, used as a sensing layer on Al interdigitated electrodes prepared using a sol–gel spin-coating method, are demonstrated in this study. The p-type MZT/Al/SiO₂ /Si structure for sensing NO₂ is also discussed. The results indicated that the best sensitivity of the gas sensor occurred when it was operating at a temperature ranging from 100 to 150^◦ C. The detection limit of the sensor was as low as 250 ppb. The sensitivity of the MZT thin film was 8.64% and 34.22% for 0.25 ppm and 5 ppm of NO₂ gas molecules at a working temperature of 150^◦ C, respectively. The gas sensor also exhibited high repeatability and selectivity for NO₂. The response values to 250, 500, 1000, 1500, 2000, 2500, and 5000 ppb NO2 at 150^◦ C were 8.64, 9.52, 12, 16.63, 20.3, 23, and 34.22%, respectively. Additionally, we observed a high sensing linearity in NO₂ gas molecules. These results indicate that MZT-based materials have potential applications for use as gas sensors.