Magnetic cantilever actuator with sharpened magnetic thin film ellipses

Chen Yu Huang, Tzong Rong Ger, Mei Feng Lai, We Yun Chen, Hao Ting Huang, Jiann Yeu Chen, Pei Jen Wang, Zung Hang Wei

Research output: Contribution to journalArticlepeer-review

2 Citations (Scopus)


A SiO2 cantilever covered by elliptical magnetic thin films was designed as an actuator. Under magnetic field, the elliptical magnetic film with sharp ends would exhibit single-domain structures and generate torque to push or pull the two arms of the cantilever. The cantilever could then stretch or compress and the displacement could be controlled by adjusting the magnitude and direction of the external magnetic field. The combination between micromagnetism of patterned films and actuator was successfully demonstrated. The magnetic actuator can be applied for future application in the biological field and would be valuable for microelectromechanical systems (MEMS).

Original languageEnglish
Article number17B740
JournalJournal of Applied Physics
Issue number17
Publication statusPublished - 2015 May 7

All Science Journal Classification (ASJC) codes

  • General Physics and Astronomy


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