Magnetron sputtering of tantalum oxide thin electrolyte film for electrochromic applications

Chien Cheng Liu, Kuang I. Liu, Hao Tung Lin, Jow Lay Huang

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

Electrochromism have been widely investigated due to their potential applications such as automobile and building window. In this study, tantalum oxide thin films used as ion conducting layer were deposited on WO 3/ITO at room temperature by magnetron sputtering. The thickness of tantalum oxide films were varied to investigate their effects on composition, microstructure, optical properties, and electrochromic properties determined by X-ray diffraction, UV-visible spectrometer, Atomic force microscope (AFM), and field-emission scanning electron microscope (FE-SEM), respectively. Experimental results indicated Ta2O5 thin film with the thickness of 300 nm showed better electrochromic property.

Original languageEnglish
Title of host publicationHigh-Performance Ceramics VII
PublisherTrans Tech Publications Ltd
Pages1604-1608
Number of pages5
ISBN (Print)9783037854259
DOIs
Publication statusPublished - 2012 Jan 1
Event7th China International Conference on High-Performance Ceramics, CICC-7 - Xiamen, China
Duration: 2011 Nov 42011 Nov 7

Publication series

NameKey Engineering Materials
Volume512-515
ISSN (Print)1013-9826
ISSN (Electronic)1662-9795

Other

Other7th China International Conference on High-Performance Ceramics, CICC-7
CountryChina
CityXiamen
Period11-11-0411-11-07

All Science Journal Classification (ASJC) codes

  • Materials Science(all)
  • Mechanics of Materials
  • Mechanical Engineering

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  • Cite this

    Liu, C. C., Liu, K. I., Lin, H. T., & Huang, J. L. (2012). Magnetron sputtering of tantalum oxide thin electrolyte film for electrochromic applications. In High-Performance Ceramics VII (pp. 1604-1608). (Key Engineering Materials; Vol. 512-515). Trans Tech Publications Ltd. https://doi.org/10.4028/www.scientific.net/KEM.512-515.1604