Manufacturability of multivariate applications in the semiconductor industry

Chang Yung Cheng Jonathan, Fan Tien Cheng

Research output: Chapter in Book/Report/Conference proceedingConference contribution

3 Citations (Scopus)

Abstract

When advanced automation technologies are applied in the semiconductor industry, advanced equipment control has become increasingly feasible; hence it is now easier to improve overall manufacturing performance, including cycle time, productivity, and product quality. Currently, Fault Detection and Classification (FDC) is a newly deployed system that supports tool control in the semiconductor industry. Based on comprehensive and real time tool sensor data of an FDC infrastructure, numerous novel multivariate applications have been developed to further enhance tool and manufacturing productivity. However, when most multivariate applications were designed and pilot run in production environment, they all encountered a similar challenge - manufacturability. Because of insufficiency of manufacturing know-how and manufacturability, most multivariate applications cannot be widely deployed to an entire FAB for all types of tools and processes. This work investigates various multivariate applications and presents a novel methodology for improving manufacturability design of multivariate applications in the semiconductor industry.

Original languageEnglish
Title of host publication2006 IEEE International Conference on Automation Science and Engineering, CASE
PublisherInstitute of Electrical and Electronics Engineers Inc.
Pages230-235
Number of pages6
ISBN (Print)1424403103, 9781424403103
DOIs
Publication statusPublished - 2006 Jan 1
Event2006 IEEE International Conference on Automation Science and Engineering, CASE - Shanghai, China
Duration: 2006 Oct 82006 Oct 10

Publication series

Name2006 IEEE International Conference on Automation Science and Engineering, CASE

Other

Other2006 IEEE International Conference on Automation Science and Engineering, CASE
CountryChina
CityShanghai
Period06-10-0806-10-10

All Science Journal Classification (ASJC) codes

  • Control and Systems Engineering
  • Electrical and Electronic Engineering

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