Abstract
A manufacturing execution system (MES) with virtual-metrology capabilities and a manufacturing system including the MES are provided. The MES is built on a middleware architecture (such as an object request broker architecture), and includes an equipment manager, a virtual metrology system (VMS), a statistical process control (SPC) system, an alarm manager and a scheduler. The manufacturing system includes a first process tool, a second process tool, a metrology tool, the aforementioned MES, a first R2R (Run-to-Run) controller and a second R2R controller.
| Translated title of the contribution | 具有虛擬量測功能的製造執行系統與製造系統 |
|---|---|
| Original language | English |
| Patent number | 8983644 |
| Publication status | Published - 2011 Oct 13 |
Fingerprint
Dive into the research topics of 'Manufacturing execution system with virtual-metrology capabilities and manufacturing system including the same'. Together they form a unique fingerprint.Cite this
- APA
- Author
- BIBTEX
- Harvard
- Standard
- RIS
- Vancouver