Manufacturing execution system with virtual-metrology capabilities and manufacturing system including the same

Fan-Tien Cheng (Inventor)

Research output: Patent

Abstract

A manufacturing execution system (MES) with virtual-metrology capabilities and a manufacturing system including the MES are provided. The MES is built on a middleware architecture (such as an object request broker architecture), and includes an equipment manager, a virtual metrology system (VMS), a statistical process control (SPC) system, an alarm manager and a scheduler. The manufacturing system includes a first process tool, a second process tool, a metrology tool, the aforementioned MES, a first R2R (Run-to-Run) controller and a second R2R controller.
Translated title of the contribution具有虛擬量測功能的製造執行系統與製造系統
Original languageEnglish
Patent number8983644
Publication statusPublished - 2011 Oct 13

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