MBE growth of tilted superlattices: advances and novel structures

P. M. Petroff, M. S. Miller, Y. T. Lu, S. A. Chalmers, H. Metiu, H. Kroemer, A. C. Gossard

Research output: Contribution to journalArticle

16 Citations (Scopus)


The vicinal surface ordering required for the TSL deposition has been studied as a function of temperature and composition for GaxAl1-xAs, GaSb and AlSb surfaces. The interface sharpness observed during the Al-Ga co-deposition and self-organization on a vicinal surface has been modeled using a stochastic kinetics method. The modeling reproduces well the observations. To avoid critical effects of the tilt parameter variations, a novel structure, the serpentine superlattice, has been proposed. This structure has a "build in" two-dimensional confinement and yields uniform luminescence properties over large wafer areas. Finally, the TSL concept has been demonstrated for a novel system, the GaSb-AlSb system.

Original languageEnglish
Pages (from-to)360-365
Number of pages6
JournalJournal of Crystal Growth
Issue number1-4
Publication statusPublished - 1991 May 2

All Science Journal Classification (ASJC) codes

  • Condensed Matter Physics
  • Inorganic Chemistry
  • Materials Chemistry

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