Measurement of adhesive force between two mica surfaces with multiple beam interferometry

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

Surface forces play a crucial role in the contact behavior of micro-components as well as the application of MEMS products. In this study, a microscopic measurement system based on multiple beam interferometry is developed to measure the adhesive force between two mica thin films. The contact area on the mica can be determined from the FECO fringes. A double cantilever spring is used to measure the adhesive (pull-off) forces between the two mica thin films. The usefulness of the adhesive force measurement system is validated by comparing with the result from JKR contact theory.

Original languageEnglish
Title of host publicationSociety for Experimental Mechanics - SEM Annual Conference and Exposition on Experimental and Applied Mechanics 2010
Pages1685-1689
Number of pages5
Publication statusPublished - 2010 Nov 9
EventSEM Annual Conference and Exposition on Experimental and Applied Mechanics 2010 - Indianapolis, IN, United States
Duration: 2010 Jun 72010 Jun 10

Publication series

NameSociety for Experimental Mechanics - SEM Annual Conference and Exposition on Experimental and Applied Mechanics 2010
Volume2

Other

OtherSEM Annual Conference and Exposition on Experimental and Applied Mechanics 2010
Country/TerritoryUnited States
CityIndianapolis, IN
Period10-06-0710-06-10

All Science Journal Classification (ASJC) codes

  • Mechanics of Materials

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