Measurement of adhesive force between two mica surfaces with multiple beam interferometry

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

Surface forces play a crucial role in the contact behavior of micro-components as well as the application of MEMS products. In this study, a microscopic measurement system based on multiple beam interferometry is developed to measure the adhesive force between two mica thin films. The contact area on the mica can be determined from the FECO fringes. A double cantilever spring is used to measure the adhesive (pull-off) forces between the two mica thin films. The usefulness of the adhesive force measurement system is validated by comparing with the result from JKR contact theory.

Original languageEnglish
Title of host publicationMEMS and Nanotechnology - Proceedings of the 2010 Annual Conference on Experimental and Applied Mechanics
Pages197-201
Number of pages5
Volume2
Publication statusPublished - 2011
Event2010 Annual Conference on Experimental and Applied Mechanics - Indianapolis, IN, United States
Duration: 2010 Jun 72010 Jun 10

Other

Other2010 Annual Conference on Experimental and Applied Mechanics
CountryUnited States
CityIndianapolis, IN
Period10-06-0710-06-10

Fingerprint

Mica
Interferometry
Adhesives
Thin films
Force measurement
MEMS

All Science Journal Classification (ASJC) codes

  • Engineering(all)
  • Computational Mechanics
  • Mechanical Engineering

Cite this

Chen, T. Y-F., & Jung, J. C. (2011). Measurement of adhesive force between two mica surfaces with multiple beam interferometry. In MEMS and Nanotechnology - Proceedings of the 2010 Annual Conference on Experimental and Applied Mechanics (Vol. 2, pp. 197-201)
Chen, Terry Yuan-Fang ; Jung, J. C. / Measurement of adhesive force between two mica surfaces with multiple beam interferometry. MEMS and Nanotechnology - Proceedings of the 2010 Annual Conference on Experimental and Applied Mechanics. Vol. 2 2011. pp. 197-201
@inproceedings{6c73a0a9fe814b4498c588256fb99f2c,
title = "Measurement of adhesive force between two mica surfaces with multiple beam interferometry",
abstract = "Surface forces play a crucial role in the contact behavior of micro-components as well as the application of MEMS products. In this study, a microscopic measurement system based on multiple beam interferometry is developed to measure the adhesive force between two mica thin films. The contact area on the mica can be determined from the FECO fringes. A double cantilever spring is used to measure the adhesive (pull-off) forces between the two mica thin films. The usefulness of the adhesive force measurement system is validated by comparing with the result from JKR contact theory.",
author = "Chen, {Terry Yuan-Fang} and Jung, {J. C.}",
year = "2011",
language = "English",
isbn = "9781441988249",
volume = "2",
pages = "197--201",
booktitle = "MEMS and Nanotechnology - Proceedings of the 2010 Annual Conference on Experimental and Applied Mechanics",

}

Chen, TY-F & Jung, JC 2011, Measurement of adhesive force between two mica surfaces with multiple beam interferometry. in MEMS and Nanotechnology - Proceedings of the 2010 Annual Conference on Experimental and Applied Mechanics. vol. 2, pp. 197-201, 2010 Annual Conference on Experimental and Applied Mechanics, Indianapolis, IN, United States, 10-06-07.

Measurement of adhesive force between two mica surfaces with multiple beam interferometry. / Chen, Terry Yuan-Fang; Jung, J. C.

MEMS and Nanotechnology - Proceedings of the 2010 Annual Conference on Experimental and Applied Mechanics. Vol. 2 2011. p. 197-201.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

TY - GEN

T1 - Measurement of adhesive force between two mica surfaces with multiple beam interferometry

AU - Chen, Terry Yuan-Fang

AU - Jung, J. C.

PY - 2011

Y1 - 2011

N2 - Surface forces play a crucial role in the contact behavior of micro-components as well as the application of MEMS products. In this study, a microscopic measurement system based on multiple beam interferometry is developed to measure the adhesive force between two mica thin films. The contact area on the mica can be determined from the FECO fringes. A double cantilever spring is used to measure the adhesive (pull-off) forces between the two mica thin films. The usefulness of the adhesive force measurement system is validated by comparing with the result from JKR contact theory.

AB - Surface forces play a crucial role in the contact behavior of micro-components as well as the application of MEMS products. In this study, a microscopic measurement system based on multiple beam interferometry is developed to measure the adhesive force between two mica thin films. The contact area on the mica can be determined from the FECO fringes. A double cantilever spring is used to measure the adhesive (pull-off) forces between the two mica thin films. The usefulness of the adhesive force measurement system is validated by comparing with the result from JKR contact theory.

UR - http://www.scopus.com/inward/record.url?scp=79960326644&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=79960326644&partnerID=8YFLogxK

M3 - Conference contribution

SN - 9781441988249

VL - 2

SP - 197

EP - 201

BT - MEMS and Nanotechnology - Proceedings of the 2010 Annual Conference on Experimental and Applied Mechanics

ER -

Chen TY-F, Jung JC. Measurement of adhesive force between two mica surfaces with multiple beam interferometry. In MEMS and Nanotechnology - Proceedings of the 2010 Annual Conference on Experimental and Applied Mechanics. Vol. 2. 2011. p. 197-201