Measurement of Dielectric Property by Evanescent Microwave Microscope

Yi Chun Chen, Hsiu Fung Cheng, Gang Wang, Xiao Dong Xiang, Chien Ming Lei, I. Nan Lin

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10 Citations (Scopus)


Microwave dielectric properties of (Bi1.5Zn1.0Nb 1.5)O7/MgO (BiZN/MgO) thin films were measured at 2.85 GHz by an evanescent microwave probe (EMP) technique. This is the first time that the dielectric properties of a thin film have been characterized in the microwave frequency region. The dielectric constant of the BiZN/MgO films increases with the deposition temperature, which is apparently due to the increase in crystallinity and the change in the preferred orientation of the films. High-resolution EMP measurement reveals that the films consist of ultrasmall grains about 0.4/zm in diameter. The dielectric constant (K) of BiZN/MgO films is comparable to that of the BiZN bulk materials, whereas the loss factor (tan S) of the films is markedly larger than that of the ceramics.

Original languageEnglish
Pages (from-to)7214-7217
Number of pages4
JournalJapanese Journal of Applied Physics
Issue number11 B
Publication statusPublished - 2002 Nov

All Science Journal Classification (ASJC) codes

  • Engineering(all)
  • Physics and Astronomy(all)


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