TY - GEN
T1 - Measurement of DNA hybridization by nano-deformation of microcantilever in CMOS biosensor
AU - Yang, S. M.
AU - Yin, T. I.
AU - Chang, C.
N1 - Copyright:
Copyright 2013 Elsevier B.V., All rights reserved.
PY - 2008
Y1 - 2008
N2 - A 1 cm × 1 cm biosensor chip for analyzing DNA hybridization is developed by CMOS process. The sensor chip has 6 measurement regions, each region with 3 pairs of parallel microcantilever of 125 × 60 × 0.75μm. The microcantilever is a 4-layer structure composed of an immobilized surface layer, a top insulation layer, an embedded piezoresistive layer, and a bottom insulation layer to measure the nano-deformation induced by the surface-assemble monolayer of alkanethiols on Au. By the Langmuir adsorption model, the estimated adsorption rate of the ssDNA is 0.005sec'1. The design has intrinsic sensitivity needed in biochemical applications such as detecting nucleotide polymorphism and single base mutation to sequence DNA. The capability of in-situ, multipoint measurement promise many frontiers to be explored.
AB - A 1 cm × 1 cm biosensor chip for analyzing DNA hybridization is developed by CMOS process. The sensor chip has 6 measurement regions, each region with 3 pairs of parallel microcantilever of 125 × 60 × 0.75μm. The microcantilever is a 4-layer structure composed of an immobilized surface layer, a top insulation layer, an embedded piezoresistive layer, and a bottom insulation layer to measure the nano-deformation induced by the surface-assemble monolayer of alkanethiols on Au. By the Langmuir adsorption model, the estimated adsorption rate of the ssDNA is 0.005sec'1. The design has intrinsic sensitivity needed in biochemical applications such as detecting nucleotide polymorphism and single base mutation to sequence DNA. The capability of in-situ, multipoint measurement promise many frontiers to be explored.
UR - http://www.scopus.com/inward/record.url?scp=44349164449&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=44349164449&partnerID=8YFLogxK
U2 - 10.1115/MN2008-47047
DO - 10.1115/MN2008-47047
M3 - Conference contribution
AN - SCOPUS:44349164449
SN - 0791842916
SN - 9780791842911
T3 - Proceedings of the ASME 2nd Multifunctional Nanocomposites and Nanomaterials Conference, MN2008
SP - 217
EP - 221
BT - Proceedings of the ASME 2nd Multifunctional Nanocomposites and Nanomaterials Conference, MN2008
T2 - ASME 2nd Multifunctional Nanocomposites and Nanomaterials Conference, MN2008
Y2 - 11 January 2008 through 13 January 2008
ER -