Measurement of DNA hybridization by nano-deformation of microcantilever in CMOS biosensor

Shih-Ming Yang, T. I. Yin, C. Chang

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

A 1 cm × 1 cm biosensor chip for analyzing DNA hybridization is developed by CMOS process. The sensor chip has 6 measurement regions, each region with 3 pairs of parallel microcantilever of 125 × 60 × 0.75μm. The microcantilever is a 4-layer structure composed of an immobilized surface layer, a top insulation layer, an embedded piezoresistive layer, and a bottom insulation layer to measure the nano-deformation induced by the surface-assemble monolayer of alkanethiols on Au. By the Langmuir adsorption model, the estimated adsorption rate of the ssDNA is 0.005sec'1. The design has intrinsic sensitivity needed in biochemical applications such as detecting nucleotide polymorphism and single base mutation to sequence DNA. The capability of in-situ, multipoint measurement promise many frontiers to be explored.

Original languageEnglish
Title of host publicationProceedings of the ASME 2nd Multifunctional Nanocomposites and Nanomaterials Conference, MN2008
Pages217-221
Number of pages5
DOIs
Publication statusPublished - 2008 Jun 2
EventASME 2nd Multifunctional Nanocomposites and Nanomaterials Conference, MN2008 - Sharm El Sheikh, Egypt
Duration: 2008 Jan 112008 Jan 13

Publication series

NameProceedings of the ASME 2nd Multifunctional Nanocomposites and Nanomaterials Conference, MN2008

Other

OtherASME 2nd Multifunctional Nanocomposites and Nanomaterials Conference, MN2008
CountryEgypt
CitySharm El Sheikh
Period08-01-1108-01-13

All Science Journal Classification (ASJC) codes

  • Electrical and Electronic Engineering
  • Mechanical Engineering
  • Condensed Matter Physics

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