Measurement of friction force between two mica surfaces with multiple beam interferometry

Research output: Contribution to journalConference article

1 Citation (Scopus)

Abstract

Friction forces play a crucial role in the tribological behaviour of microcomponents and the application of MEMS products. It is necessary to develop a measurement system to understand and control the material characteristics. In this study, a microscopic measurement system based on multiple beam interferometry is developed to measure the friction force between two mica thin films. Some frictional behaviour between the two mica sheets in contact are reported. The evaluated shear strength of mica agrees well to the existing data. It is possible to use the developed system for micro-tribology study.

Original languageEnglish
Article number06002
JournalEPJ Web of Conferences
Volume6
DOIs
Publication statusPublished - 2010 Jun 9
Event14th International Conference on Experimental Mechanics, ICEM 2014 - Poitiers, France
Duration: 2010 Jul 42010 Jul 9

Fingerprint

mica
interferometry
friction
tribology
shear strength
microelectromechanical systems
products
thin films

All Science Journal Classification (ASJC) codes

  • Physics and Astronomy(all)

Cite this

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title = "Measurement of friction force between two mica surfaces with multiple beam interferometry",
abstract = "Friction forces play a crucial role in the tribological behaviour of microcomponents and the application of MEMS products. It is necessary to develop a measurement system to understand and control the material characteristics. In this study, a microscopic measurement system based on multiple beam interferometry is developed to measure the friction force between two mica thin films. Some frictional behaviour between the two mica sheets in contact are reported. The evaluated shear strength of mica agrees well to the existing data. It is possible to use the developed system for micro-tribology study.",
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Measurement of friction force between two mica surfaces with multiple beam interferometry. / Jung, J. C.; Chen, Terry Yuan-Fang.

In: EPJ Web of Conferences, Vol. 6, 06002, 09.06.2010.

Research output: Contribution to journalConference article

TY - JOUR

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N2 - Friction forces play a crucial role in the tribological behaviour of microcomponents and the application of MEMS products. It is necessary to develop a measurement system to understand and control the material characteristics. In this study, a microscopic measurement system based on multiple beam interferometry is developed to measure the friction force between two mica thin films. Some frictional behaviour between the two mica sheets in contact are reported. The evaluated shear strength of mica agrees well to the existing data. It is possible to use the developed system for micro-tribology study.

AB - Friction forces play a crucial role in the tribological behaviour of microcomponents and the application of MEMS products. It is necessary to develop a measurement system to understand and control the material characteristics. In this study, a microscopic measurement system based on multiple beam interferometry is developed to measure the friction force between two mica thin films. Some frictional behaviour between the two mica sheets in contact are reported. The evaluated shear strength of mica agrees well to the existing data. It is possible to use the developed system for micro-tribology study.

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