Friction forces play a crucial role in the tribological behaviour of microcomponents and the application of MEMS products. It is necessary to develop a measurement system to understand and control the material characteristics. In this study, a microscopic measurement system based on multiple beam interferometry is developed to measure the friction force between two mica thin films. Some frictional behaviour between the two mica sheets in contact are reported. The evaluated shear strength of mica agrees well to the existing data. It is possible to use the developed system for micro-tribology study.
|Journal||EPJ Web of Conferences|
|Publication status||Published - 2010 Jun 9|
|Event||14th International Conference on Experimental Mechanics, ICEM 2014 - Poitiers, France|
Duration: 2010 Jul 4 → 2010 Jul 9
All Science Journal Classification (ASJC) codes
- Physics and Astronomy(all)