Measurement of friction force between two mica surfaces with multiple beam interferometry

J. C. Jung; T. Chen

doi:10.1051/epjconf/20100606002

Measurement of friction force between two mica surfaces with multiple beam interferometry

J. C. Jung, T. Chen

Department of Mechanical Engineering

Research output: Contribution to journal › Conference article › peer-review

1 Citation (Scopus)

Abstract

Friction forces play a crucial role in the tribological behaviour of microcomponents and the application of MEMS products. It is necessary to develop a measurement system to understand and control the material characteristics. In this study, a microscopic measurement system based on multiple beam interferometry is developed to measure the friction force between two mica thin films. Some frictional behaviour between the two mica sheets in contact are reported. The evaluated shear strength of mica agrees well to the existing data. It is possible to use the developed system for micro-tribology study.

Original language	English
Article number	06002
Journal	EPJ Web of Conferences
Volume	6
DOIs	https://doi.org/10.1051/epjconf/20100606002
Publication status	Published - 2010 Jun 9
Event	14th International Conference on Experimental Mechanics, ICEM 2014 - Poitiers, France Duration: 2010 Jul 4 → 2010 Jul 9

All Science Journal Classification (ASJC) codes

Physics and Astronomy(all)

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10.1051/epjconf/20100606002

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title = "Measurement of friction force between two mica surfaces with multiple beam interferometry",

abstract = "Friction forces play a crucial role in the tribological behaviour of microcomponents and the application of MEMS products. It is necessary to develop a measurement system to understand and control the material characteristics. In this study, a microscopic measurement system based on multiple beam interferometry is developed to measure the friction force between two mica thin films. Some frictional behaviour between the two mica sheets in contact are reported. The evaluated shear strength of mica agrees well to the existing data. It is possible to use the developed system for micro-tribology study.",

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AU - Chen, T.

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N2 - Friction forces play a crucial role in the tribological behaviour of microcomponents and the application of MEMS products. It is necessary to develop a measurement system to understand and control the material characteristics. In this study, a microscopic measurement system based on multiple beam interferometry is developed to measure the friction force between two mica thin films. Some frictional behaviour between the two mica sheets in contact are reported. The evaluated shear strength of mica agrees well to the existing data. It is possible to use the developed system for micro-tribology study.

AB - Friction forces play a crucial role in the tribological behaviour of microcomponents and the application of MEMS products. It is necessary to develop a measurement system to understand and control the material characteristics. In this study, a microscopic measurement system based on multiple beam interferometry is developed to measure the friction force between two mica thin films. Some frictional behaviour between the two mica sheets in contact are reported. The evaluated shear strength of mica agrees well to the existing data. It is possible to use the developed system for micro-tribology study.

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T2 - 14th International Conference on Experimental Mechanics, ICEM 2014

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