Abstract
Friction forces play a crucial role in the tribological behaviour of microcomponents and the application of MEMS products. It is necessary to develop a measurement system to understand and control the material characteristics. In this study, a microscopic measurement system based on multiple beam interferometry is developed to measure the friction force between two mica thin films. Some frictional behaviour between the two mica sheets in contact are reported. The evaluated shear strength of mica agrees well to the existing data. It is possible to use the developed system for micro-tribology study.
| Original language | English |
|---|---|
| Article number | 06002 |
| Journal | EPJ Web of Conferences |
| Volume | 6 |
| DOIs | |
| Publication status | Published - 2010 Jun 9 |
| Event | 14th International Conference on Experimental Mechanics, ICEM 2014 - Poitiers, France Duration: 2010 Jul 4 → 2010 Jul 9 |
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All Science Journal Classification (ASJC) codes
- Physics and Astronomy(all)
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Measurement of friction force between two mica surfaces with multiple beam interferometry. / Jung, J. C.; Chen, T.
In: EPJ Web of Conferences, Vol. 6, 06002, 09.06.2010.Research output: Contribution to journal › Conference article
TY - JOUR
T1 - Measurement of friction force between two mica surfaces with multiple beam interferometry
AU - Jung, J. C.
AU - Chen, T.
PY - 2010/6/9
Y1 - 2010/6/9
N2 - Friction forces play a crucial role in the tribological behaviour of microcomponents and the application of MEMS products. It is necessary to develop a measurement system to understand and control the material characteristics. In this study, a microscopic measurement system based on multiple beam interferometry is developed to measure the friction force between two mica thin films. Some frictional behaviour between the two mica sheets in contact are reported. The evaluated shear strength of mica agrees well to the existing data. It is possible to use the developed system for micro-tribology study.
AB - Friction forces play a crucial role in the tribological behaviour of microcomponents and the application of MEMS products. It is necessary to develop a measurement system to understand and control the material characteristics. In this study, a microscopic measurement system based on multiple beam interferometry is developed to measure the friction force between two mica thin films. Some frictional behaviour between the two mica sheets in contact are reported. The evaluated shear strength of mica agrees well to the existing data. It is possible to use the developed system for micro-tribology study.
UR - http://www.scopus.com/inward/record.url?scp=84921342358&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=84921342358&partnerID=8YFLogxK
U2 - 10.1051/epjconf/20100606002
DO - 10.1051/epjconf/20100606002
M3 - Conference article
AN - SCOPUS:84921342358
VL - 6
JO - EPJ Web of Conferences
JF - EPJ Web of Conferences
SN - 2101-6275
M1 - 06002
ER -